Journal article
THERMAL AND PHOTOCHEMICAL VAPOR-DEPOSITION OF FE FROM FE(CO)5 ON SI(100)
- Abstract:
-
The adsorption of Fe(CO)5 on Si(100) has been studied using AES and TDS techniques; pyrolytic and photochemical decomposition reactions have been examined. The adsorbate is found to undergo a dissociative, activated adsorption reaction above 300 K resulting in formation of an Fe film in which the carbon and oxygen concentrations are a few atomic percent. The sticking probability associated with the reaction is in the range 10-3-10-4 at 500 K and the apparent activation energy is 26 ± 2 kJ mol...
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- Publication status:
- Published
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Bibliographic Details
- Journal:
- SURFACE SCIENCE
- Volume:
- 209
- Issue:
- 1-2
- Pages:
- 151-158
- Publication date:
- 1989-02-01
- DOI:
- ISSN:
-
0039-6028
Item Description
- Language:
- English
- Pubs id:
-
pubs:43239
- UUID:
-
uuid:078d95d4-faf2-444d-8e6f-3012c1ba8bf3
- Local pid:
- pubs:43239
- Source identifiers:
-
43239
- Deposit date:
- 2012-12-19
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- Copyright date:
- 1989
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