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Journal article

THERMAL AND ION-BEAM-INDUCED ETCHING OF INP WITH CHLORINE

Publication status:
Published

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Journal:
JOURNAL OF PHYSICS-CONDENSED MATTER More from this journal
Volume:
1
Pages:
SB179-SB180
Publication date:
1989-10-01
ISSN:
0953-8984
Pubs id:
pubs:43147
UUID:
uuid:07048316-4467-4e4e-b664-7491c7f612ec
Local pid:
pubs:43147
Source identifiers:
43147
Deposit date:
2012-12-19

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