Journal article
THERMAL AND ION-BEAM-INDUCED ETCHING OF INP WITH CHLORINE
- Publication status:
- Published
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Authors
- Journal:
- JOURNAL OF PHYSICS-CONDENSED MATTER More from this journal
- Volume:
- 1
- Pages:
- SB179-SB180
- Publication date:
- 1989-10-01
- ISSN:
-
0953-8984
- Pubs id:
-
pubs:43147
- UUID:
-
uuid:07048316-4467-4e4e-b664-7491c7f612ec
- Local pid:
-
pubs:43147
- Source identifiers:
-
43147
- Deposit date:
-
2012-12-19
- ARK identifier:
Terms of use
- Copyright date:
- 1989
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