Journal article
Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas
- Publication status:
- Published
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Bibliographic Details
- Journal:
- JOURNAL OF APPLIED PHYSICS More from this journal
- Volume:
- 81
- Issue:
- 9
- Pages:
- 5945-5949
- Publication date:
- 1997-05-01
- DOI:
- ISSN:
-
0021-8979
Item Description
- Pubs id:
-
pubs:45530
- UUID:
-
uuid:051dcbb2-54be-4a09-8ddd-1c21c7598220
- Local pid:
-
pubs:45530
- Source identifiers:
-
45530
- Deposit date:
-
2012-12-19
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- Copyright date:
- 1997
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