Characterisation of aluminium oxynitride gas barrier films

Journal article

In the last decade, metal oxide layers deposited on polymer substrates have been utilised as gas barrier films in food packaging as an alternative to the traditional aluminium foil. The resistance of these composite films to gas transmission is controlled predominantly by nano-scale defects created during the fabrication of the oxide layer. The size and density of these defects are believed to be strongly dependent on the intrinsic properties of the metal oxide layer. Changing the chemical co...

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Authors: Erlat, A; Henry, B; Ingram, J; Mountain, D; McGuigan, A

• Publication status: Published
• Journal: THIN SOLID FILMS
• Volume: 388
• Issue: 1-2
• Pages: 78-86
• Publication date: 2001-06-01
• DOI: 10.1016/S0040-6090(01)00836-7
• ISSN: 0040-6090
• Language: English
• Keywords: gas barrier films; Poly (ethylene terepthalate); Reactive magnetron sputtering; aluminium oxynitride