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Ion implantation processing of GaN epitaxial layers

Publication status:
Published

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Authors


Williams, JS More by this author
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Pearton, SJ More by this author
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Volume:
96
Issue:
11
Pages:
142-148
Publication date:
1996
URN:
uuid:ffeba218-7f28-4efd-8467-e88a076997b3
Source identifiers:
20409
Local pid:
pubs:20409
ISBN:
1-56677-163-3

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