Conference item
Understanding the chemistry of low temperature diamond growth: an investigation into the interaction of chlorine and atomic hydrogen at CVD diamond surfaces
- Abstract:
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The interaction of chlorine with CVD diamond surfaces has been studied using Auger and photoelectron spectroscopy techniques, with reference to the development of low temperature growth models for diamond using halogen-based precursors. Chlorine is found to adsorb on the clean CVD surface with a sticking probability of ~0.001 at 300 K, although this can be enhanced by prehydrogenation of the surface and by raising the substrate temperature. Adsorbed chlorine desorbs from the surface over a wi...
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- Publication status:
- Published
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- Publisher copy:
- 10.1016/S0925-9635(99)00313-1
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Bibliographic Details
- Publisher:
- Elsevier
- Volume:
- 9
- Issue:
- 3-6
- Pages:
- 246-250
- Host title:
- DIAMOND AND RELATED MATERIALS
- Publication date:
- 2000-01-01
- DOI:
- ISSN:
-
0925-9635
- Source identifiers:
-
37489
Item Description
- Keywords:
- Pubs id:
-
pubs:37489
- UUID:
-
uuid:ff9bd0f9-3e79-4e83-8314-f422fa4e3234
- Local pid:
- pubs:37489
- Deposit date:
- 2012-12-19
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- Copyright date:
- 2000
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