- Abstract:
-
The interaction of chlorine with CVD diamond surfaces has been studied using Auger and photoelectron spectroscopy techniques, with reference to the development of low temperature growth models for diamond using halogen-based precursors. Chlorine is found to adsorb on the clean CVD surface with a sticking probability of ~0.001 at 300 K, although this can be enhanced by prehydrogenation of the surface and by raising the substrate temperature. Adsorbed chlorine desorbs from the surface over a wi...
Expand abstract - Publication status:
- Published
- Publisher copy:
- 10.1016/S0925-9635(99)00313-1
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- Publisher:
- Elsevier Sequoia SA
- Volume:
- 9
- Issue:
- 3-6
- Pages:
- 246-250
- Publication date:
- 2000-01-01
- DOI:
- ISSN:
-
0925-9635
- URN:
-
uuid:ff9bd0f9-3e79-4e83-8314-f422fa4e3234
- Source identifiers:
-
37489
- Local pid:
- pubs:37489
- Copyright date:
- 2000
Conference
Understanding the chemistry of low temperature diamond growth: an investigation into the interaction of chlorine and atomic hydrogen at CVD diamond surfaces
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