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Understanding the chemistry of low temperature diamond growth: an investigation into the interaction of chlorine and atomic hydrogen at CVD diamond surfaces

Abstract:

The interaction of chlorine with CVD diamond surfaces has been studied using Auger and photoelectron spectroscopy techniques, with reference to the development of low temperature growth models for diamond using halogen-based precursors. Chlorine is found to adsorb on the clean CVD surface with a sticking probability of ~0.001 at 300 K, although this can be enhanced by prehydrogenation of the surface and by raising the substrate temperature. Adsorbed chlorine desorbs from the surface over a wi...

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Publication status:
Published

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Publisher:
Elsevier
Volume:
9
Issue:
3-6
Pages:
246-250
Host title:
DIAMOND AND RELATED MATERIALS
Publication date:
2000-01-01
DOI:
ISSN:
0925-9635
Source identifiers:
37489
Keywords:
Pubs id:
pubs:37489
UUID:
uuid:ff9bd0f9-3e79-4e83-8314-f422fa4e3234
Local pid:
pubs:37489
Deposit date:
2012-12-19

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