Conference icon

Conference

Understanding the chemistry of low temperature diamond growth: an investigation into the interaction of chlorine and atomic hydrogen at CVD diamond surfaces

Abstract:

The interaction of chlorine with CVD diamond surfaces has been studied using Auger and photoelectron spectroscopy techniques, with reference to the development of low temperature growth models for diamond using halogen-based precursors. Chlorine is found to adsorb on the clean CVD surface with a sticking probability of ~0.001 at 300 K, although this can be enhanced by prehydrogenation of the surface and by raising the substrate temperature. Adsorbed chlorine desorbs from the surface over a wi...

Expand abstract
Publication status:
Published

Actions


Access Document


Authors


Expand authors...
Publisher:
Elsevier Sequoia SA
Volume:
9
Issue:
3-6
Pages:
246-250
Publication date:
2000-01-01
DOI:
ISSN:
0925-9635
URN:
uuid:ff9bd0f9-3e79-4e83-8314-f422fa4e3234
Source identifiers:
37489
Local pid:
pubs:37489

Terms of use


Metrics


Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP