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Infrared single wavelength gas composition monitoring for metalorganic vapour-phase epitaxy

Abstract:

We discuss the use of fixed wavelength infrared absorption measurements as a means for observing compositional changes in MOVPE process gas mixtures using relatively simple instrumentation consisting of an incandescent lamp, a narrow bandpass filter matched to the CH stretch modes of the alkyl precursors, and an infrared detector. An advantage of this setup is that the low energy of the infrared radiation does not induce photolysis reactions on the analyser cell windows in contrast to ultravi...

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Publication status:
Published

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Authors


Watkins, SP More by this author
Pinnington, T More by this author
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Publisher:
Elsevier Science B.V.
Volume:
221
Issue:
1-4
Pages:
166-171
Publication date:
2000-12-05
DOI:
ISSN:
0022-0248
URN:
uuid:fe8dd7c2-9cd0-4a76-b9cc-3bbdd85d2da0
Source identifiers:
26255
Local pid:
pubs:26255

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