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Infrared single wavelength gas composition monitoring for metalorganic vapour-phase epitaxy

Abstract:

We discuss the use of fixed wavelength infrared absorption measurements as a means for observing compositional changes in MOVPE process gas mixtures using relatively simple instrumentation consisting of an incandescent lamp, a narrow bandpass filter matched to the CH stretch modes of the alkyl precursors, and an infrared detector. An advantage of this setup is that the low energy of the infrared radiation does not induce photolysis reactions on the analyser cell windows in contrast to ultravi...

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Publication status:
Published

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Publisher:
Elsevier
Journal:
JOURNAL OF CRYSTAL GROWTH More from this journal
Volume:
221
Issue:
1-4
Pages:
166-171
Publication date:
2000-12-01
Event title:
10th International Conference on Metalorganic Vapor Phase Epitaxy (ICMOVPE-X)
DOI:
ISSN:
0022-0248
Keywords:
Pubs id:
pubs:26255
UUID:
uuid:fe8dd7c2-9cd0-4a76-b9cc-3bbdd85d2da0
Local pid:
pubs:26255
Source identifiers:
26255
Deposit date:
2012-12-19

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