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Improvements in the mass resolution of the three-dimensional atom probe

Abstract:

A new three-dimensional atom probe has been developed, in which energy compensation has been included in order to improve the mass resolution of the technique. A first order reflectron is used as its energy compensating device. The incorporation of a reflectron in a three-dimensional atom probe is less straightforward than when used in a conventional atom probe, and special care has to be taken in the design to ensure satisfactory performance, both in terms of mass resolution and spatial reso...

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Publication status:
Published

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Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Role:
Author
Journal:
APPLIED SURFACE SCIENCE More from this journal
Volume:
94-5
Pages:
428-433
Publication date:
1996-03-01
Event title:
42nd International Field Emission Symposium
DOI:
ISSN:
0169-4332
Keywords:
Pubs id:
pubs:16164
UUID:
uuid:fce87a74-7173-4ac6-94fa-e5fec04d6638
Local pid:
pubs:16164
Source identifiers:
16164
Deposit date:
2012-12-19

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