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DECONVOLUTION METHOD TO OBTAIN COMPOSITION PROFILES FROM SEM BACKSCATTERED ELECTRON SIGNAL PROFILES FOR BULK SPECIMENS

Abstract:

Compositional profiles across CdTe/Cd(y)Hg(1-y)Te interfaces in bulk specimens have been determined from backscattered electron (BSE) atomic-number contrast line profiles obtained using the scanning electron microscope. To improve the spatial resolution in the interface region, a numerical deconvolution method has been developed which enables the distorting effects associated with the beam size, the specimen scattering effects and the detector characteristics to be substantially removed from ...

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Publication status:
Published

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Authors


WILSHAW, P More by this author
Publisher:
Elsevier Science Publishers B.V.
Journal:
ULTRAMICROSCOPY
Volume:
55
Issue:
2
Pages:
183-195
Publication date:
1994-08-05
DOI:
ISSN:
0304-3991
URN:
uuid:e6ee0c5e-86ec-40c1-8778-b18bcc9a87a3
Source identifiers:
3035
Local pid:
pubs:3035
Language:
English

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