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DECONVOLUTION METHOD TO OBTAIN COMPOSITION PROFILES FROM SEM BACKSCATTERED ELECTRON SIGNAL PROFILES FOR BULK SPECIMENS

Abstract:

Compositional profiles across CdTe/Cd(y)Hg(1-y)Te interfaces in bulk specimens have been determined from backscattered electron (BSE) atomic-number contrast line profiles obtained using the scanning electron microscope. To improve the spatial resolution in the interface region, a numerical deconvolution method has been developed which enables the distorting effects associated with the beam size, the specimen scattering effects and the detector characteristics to be substantially removed from ...

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Publication status:
Published

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Publisher:
Elsevier
Journal:
ULTRAMICROSCOPY More from this journal
Volume:
55
Issue:
2
Pages:
183-195
Publication date:
1994-08-01
DOI:
ISSN:
0304-3991
Language:
English
Pubs id:
pubs:3035
UUID:
uuid:e6ee0c5e-86ec-40c1-8778-b18bcc9a87a3
Local pid:
pubs:3035
Source identifiers:
3035
Deposit date:
2012-12-19

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