Journal article

Direct-write non-linear photolithography for semiconductor nanowire characterization.

Abstract:: A practical bottleneck prohibiting the rapid, confident and damage-free electrical contacting of vapour-liquid-solid grown nanowires arises from the random spatial distribution and variation in quality of the nanowires, and the contact dimensions required. Established techniques such as electron-beam lithography or focused ion-beam deposition have challenges in scaling, damage or complexity that can make a large statistical sample difficult. We present a direct laser-writing technique to allo...
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Publication status:: Published

Peer review status:: Peer reviewed

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APA Style

Parkinson, P., Jiang, N., Gao, Q., Tan, H., & Jagadish, C. (2012). Direct-write non-linear photolithography for semiconductor nanowire characterization. Nanotechnology, 23(33), 335704.

MLA Style

Parkinson, P., et al. “Direct-Write Non-Linear Photolithography for Semiconductor Nanowire Characterization.” Nanotechnology, vol. 23, no. 33, IOP Publishing, 2012, p. 335704.

Chicago Style

Parkinson, P, N Jiang, Q Gao, H Tan, and C Jagadish. 2012. “Direct-Write Non-Linear Photolithography for Semiconductor Nanowire Characterization.” Nanotechnology 23 (33): 335704.
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Files:: Direct-laser writing.pdf

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Publisher copy:: 10.1088/0957-4484/23/33/335704

Authors

+ Parkinson, P More by this author

Role:

Author

+ Jiang, N More by this author

Role:

Author

+ Gao, Q More by this author

Role:

Author

+ Tan, H More by this author

Role:

Author

+ Jagadish, C More by this author

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Author

Funding

+ Australian Research Council More from this funder

Grant:

FL0992306

+ Australian National Fabrication Facility More from this funder

Bibliographic Details

Publisher:: IOP Publishing
Journal:: Nanotechnology More from this journal
Volume:: 23
Issue:: 33
Pages:: 335704
Publication date:: 2012-08-01
DOI:: 10.1088/0957-4484/23/33/335704
EISSN:: 1361-6528
ISSN:: 0957-4484

Item Description

Language:: English
Pubs id:: pubs:423473
UUID:: uuid:e607877c-f743-48e4-8fd8-f0f77bc7865a
Local pid:: pubs:423473
Source identifiers:: 423473
Deposit date:: 2013-09-26

Terms of use

Copyright holder:: IOP Publishing Ltd
Copyright date:: 2012
Notes:: © 2012 IOP Publishing Ltd.

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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