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Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

Abstract:
A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.
Publication status:
Published

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Publisher copy:
10.1116/1.1371317

Authors


Langford, RM More by this author
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Titchmarsh, JM More by this author
Journal:
JOURNAL OF VACUUM SCIENCE and TECHNOLOGY B
Volume:
19
Issue:
3
Pages:
755-758
Publication date:
2001
DOI:
ISSN:
1071-1023
URN:
uuid:e22a2bf7-6d2f-41c5-a929-38bc5b66c6af
Source identifiers:
173041
Local pid:
pubs:173041
Language:
English

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