Journal article
On the micromechanics of micro-cantilever sensors: Property analysis and eigenstrain modeling
- Abstract:
-
Micro-cantilevers can be utilized as sensors primarily due to their low stiffness/high flexibility and high resonance frequency. The cantilever system is therefore very sensitive to small changes of properties that can be detected either as change of deflection, or of resonance frequency. The development of small forces in the near-surface layers results in significant property changes of micro-cantilevers allowing their use for the detection of very small effects, e.g. associated with the ad...
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- Publisher copy:
- 10.1016/j.sna.2007.03.007
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Bibliographic Details
- Journal:
- Sensors and Actuators, A: Physical
- Volume:
- 139
- Issue:
- 1-2 SPEC. ISS.
- Pages:
- 70-77
- Publication date:
- 2007-09-12
- DOI:
- ISSN:
-
0924-4247
- Source identifiers:
-
395858
Item Description
- Language:
- English
- Keywords:
- Pubs id:
-
pubs:395858
- UUID:
-
uuid:dee17289-b8e7-41b6-b642-baba597a6790
- Local pid:
- pubs:395858
- Deposit date:
- 2013-11-17
Terms of use
- Copyright date:
- 2007
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