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On the micromechanics of micro-cantilever sensors: Property analysis and eigenstrain modeling

Abstract:

Micro-cantilevers can be utilized as sensors primarily due to their low stiffness/high flexibility and high resonance frequency. The cantilever system is therefore very sensitive to small changes of properties that can be detected either as change of deflection, or of resonance frequency. The development of small forces in the near-surface layers results in significant property changes of micro-cantilevers allowing their use for the detection of very small effects, e.g. associated with the ad...

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Publisher copy:
10.1016/j.sna.2007.03.007

Authors


Journal:
Sensors and Actuators, A: Physical
Volume:
139
Issue:
1-2 SPEC. ISS.
Pages:
70-77
Publication date:
2007-09-12
DOI:
ISSN:
0924-4247
URN:
uuid:dee17289-b8e7-41b6-b642-baba597a6790
Source identifiers:
395858
Local pid:
pubs:395858

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