Journal article
Electrically conducting, ultra-sharp, high aspect-ratio probes for AFM fabricated by electron-beam-induced deposition of platinum.
- Abstract:
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We report on the fabrication of electrically conducting, ultra-sharp, high-aspect ratio probes for atomic force microscopy by electron-beam-induced deposition of platinum. Probes of 4.0 ±1.0 nm radius-of-curvature are routinely produced with high repeatability and near-100% yield. Contact-mode topographical imaging of the granular nature of a sputtered gold surface is used to assess the imaging performance of the probes, and the derived power spectral density plots are used to quantify the en...
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- Publication status:
- Published
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Bibliographic Details
- Journal:
- Ultramicroscopy More from this journal
- Volume:
- 133
- Pages:
- 62-66
- Publication date:
- 2013-10-01
- DOI:
- EISSN:
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1879-2723
- ISSN:
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0304-3991
Item Description
- Language:
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English
- Keywords:
- Pubs id:
-
pubs:407542
- UUID:
-
uuid:dc252f0a-7f12-4a8e-bfbf-3aab8d275be6
- Local pid:
-
pubs:407542
- Source identifiers:
-
407542
- Deposit date:
-
2013-11-16
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- Copyright date:
- 2013
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