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Potassium ions in SiO2: electrets for silicon surface passivation

Abstract:

This manuscript reports an experimental and theoretical study of the transport of potassium ions in thin silicon dioxide films. While alkali contamination was largely researched in the context of MOSFET instability, recent reports indicate that potassium ions can be embedded into oxide films to produce dielectric materials with permanent electric charge, also known as electrets. These electrets are integral to a number of applications, including the passivation of silicon surfaces for opto...

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Publication status:
Published
Peer review status:
Peer reviewed

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Publisher copy:
10.1088/1361-6463/aa9b1b

Authors


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Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Oxford college:
Exeter College
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Role:
Author
More from this funder
Funding agency for:
Bonilla Osorio, R
Grant:
EP/M022196/1
More from this funder
Funding agency for:
Wilshaw, P
Grant:
EP/M024911/1
Publisher:
IOP Science Publisher's website
Journal:
Journal of Physics D: Applied Physics Journal website
Volume:
51
Article number:
025101
Publication date:
2017-12-12
Acceptance date:
2017-11-16
DOI:
EISSN:
1361-6463
ISSN:
0022-3727
Source identifiers:
745838
Keywords:
Pubs id:
pubs:745838
UUID:
uuid:db138f04-0164-4936-b91e-6ef693a5f56e
Local pid:
pubs:745838
Deposit date:
2017-11-16

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