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Potassium ions in SiO2: electrets for silicon surface passivation

Abstract:

This manuscript reports an experimental and theoretical study of the transport of potassium ions in thin silicon dioxide films. While alkali contamination was largely researched in the context of MOSFET instability, recent reports indicate that potassium ions can be embedded into oxide films to produce dielectric materials with permanent electric charge, also known as electrets. These electrets are integral to a number of applications, including the passivation of silicon surfaces for opto...

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Publication status:
Published
Peer review status:
Peer reviewed
Version:
Accepted Manuscript

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Publisher copy:
10.1088/1361-6463/aa9b1b

Authors


More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Oxford college:
Exeter College
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Role:
Author
Publisher:
IOP Science Publisher's website
Journal:
Journal of Physics D: Applied Physics Journal website
Volume:
51
Pages:
Article: 025101
Publication date:
2017-12-12
Acceptance date:
2017-11-16
DOI:
EISSN:
1361-6463
ISSN:
0022-3727
Pubs id:
pubs:745838
URN:
uri:db138f04-0164-4936-b91e-6ef693a5f56e
UUID:
uuid:db138f04-0164-4936-b91e-6ef693a5f56e
Local pid:
pubs:745838

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