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Surface figure measurement of flat mirrors based on the subaperture stitching interferometry

Abstract:

Large flat mirrors can be characterized using a standard interferometer coupled with stitching the subaperture measurement data. Such systems can measure the global full map of the optical surface by minimizing the inconsistency of data in the adjacent regions. We present a stitching technique that makes use of a commercial phase-shifting Twyman- Green interferometer in combination with an iterative optimized stitching algorithm. The proposed method has been applied to determine the surface e...

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Publisher copy:
10.1117/12.974568

Authors


Hippler, S More by this author
Brandner, W More by this author
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Journal:
Proceedings of SPIE - The International Society for Optical Engineering
Volume:
8417
Publication date:
2012
DOI:
ISSN:
0277-786X
URN:
uuid:d9fa4174-04a7-422f-9241-ac66868d0f82
Source identifiers:
455678
Local pid:
pubs:455678

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