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Journal article

Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Abstract:

Diamond is a highly desirable material for use in x-ray optics and instrumentation. However, due to its extreme hardness and resistance to chemical attack, diamond is difficult to form into a structure suitable for x-ray lenses. Refractive lenses are capable of delivering x-ray beams with nanoscale resolution. A moulding technique for the fabrication of diamond lenses is reported. High-quality silicon moulds were made using photolithography and deep reactive ion etching. The study of the etch...

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Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Engineering Science
Role:
Author
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Journal:
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume:
23
Issue:
12
Pages:
125018-125018
Publication date:
2013-12-05
DOI:
EISSN:
1361-6439
ISSN:
0960-1317
URN:
uuid:d16b4afa-15be-47ee-80b3-5968c4e452c3
Source identifiers:
443415
Local pid:
pubs:443415
Language:
English

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