- Abstract:
-
Modulated molecular beam mass spectroscopy (MBMS) studies of the CBE growth of GaAs and InxGa1-xAs using tri-isobutylgallium (TiBG) have been carried out. The results show similarities to studies which have been carried out previously using triethylgallium (TEG) in that hey indicate that the GRa deposition efficiency is controlled by a temperature-dependent probability for the desorption of alkyls from the growth surface. Differing decomposition temperatures, desorbing species and effects ari...
Expand abstract - Publication status:
- Published
- Publisher copy:
- 10.1016/0022-0248(94)90392-1
-
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- Publisher:
- Publ by Elsevier Science Publishers B.V.
- Volume:
- 136
- Issue:
- 1-4
- Pages:
- 109-113
- Publication date:
- 1994-03-05
- DOI:
- ISSN:
-
0022-0248
- URN:
-
uuid:ce0fe52e-18e5-4ebc-8220-f7e963edf062
- Source identifiers:
-
44422
- Local pid:
- pubs:44422
- Copyright date:
- 1994
Conference
MODULATED MOLECULAR-BEAM MASS-SPECTROMETRY STUDIES OF THE GROWTH OF GAAS AND INXGA1-XAS USING TRI-ISOBUTYLGALLIUM
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