Conference item
Fabrication yield analysis and emission failure investigation of silicon field emission arrays
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Bibliographic Details
- Volume:
- 2005
- Pages:
- 169-170
- Host title:
- Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005
- Publication date:
- 2005-01-01
- DOI:
- Source identifiers:
-
151414
- ISBN-10:
- 0780383974
- ISBN-13:
- 9780780383975
Item Description
- Pubs id:
-
pubs:151414
- UUID:
-
uuid:ccd3394e-6871-4466-9318-8c48cb917364
- Local pid:
- pubs:151414
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 2005
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