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DEVELOPMENT OF A FEM, FIM-AP SYSTEM FOR STUDYING GRIDDED VACUUM MICROELECTRONIC DEVICES

Abstract:

We have modified a conventional FIM-AP system specifically for studying vacuum microelectronic (VME) devices, which includes facilities for field emission microscopy (FEM), field ion microscopy (FIM) atom probe microanalysis (AP) and current-voltage measurements. This is the first integrated experimental system for the characterisation of VME devices on the atomic scale. In this paper the behaviour of a typical gridded field emitter in different operation modes is discussed using a simple sim...

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Publication status:
Published

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Journal:
APPLIED SURFACE SCIENCE More from this journal
Volume:
87-8
Issue:
1-4
Pages:
421-427
Publication date:
1995-03-01
Event title:
41st International Field Emission Symposium (IFES 94)
DOI:
ISSN:
0169-4332
Pubs id:
pubs:30653
UUID:
uuid:cb7dbc9c-22a4-4ca0-b791-76fb16ccece6
Local pid:
pubs:30653
Source identifiers:
30653
Deposit date:
2012-12-19

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