Conference item
PLASMA KINETIC MEASUREMENTS USING TIME-RESOLVED ACTINOMETRY - COMPARISONS WITH LASER-INDUCED FLUORESCENCE
- Abstract:
-
Optical diagnostics have been used to study the steady-state concentrations and kinetics of reactive species in CF4 and CF4/O2 plasmas. The CF2 radical was studied by two techniques, laser-induced fluorescence (LIF) and optical emission, in order to test the validity of using the latter method as a way of determining relative changes in concentration of the ground-state radical. Both techniques were first used under steady-state conditions and then for measurements of time-resolved behavior f...
Expand abstract
- Publication status:
- Published
Actions
Authors
Bibliographic Details
- Host title:
- JOURNAL OF PHYSICAL CHEMISTRY
- Volume:
- 94
- Issue:
- 8
- Pages:
- 3269-3272
- Publication date:
- 1990-04-19
- DOI:
- EISSN:
-
1541-5740
- ISSN:
-
0022-3654
Item Description
- Pubs id:
-
pubs:43406
- UUID:
-
uuid:cb553c47-955f-4736-8c82-0197222ec2c0
- Local pid:
- pubs:43406
- Source identifiers:
-
43406
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 1990
Metrics
If you are the owner of this record, you can report an update to it here: Report update to this record