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PLASMA KINETIC MEASUREMENTS USING TIME-RESOLVED ACTINOMETRY - COMPARISONS WITH LASER-INDUCED FLUORESCENCE

Abstract:

Optical diagnostics have been used to study the steady-state concentrations and kinetics of reactive species in CF4 and CF4/O2 plasmas. The CF2 radical was studied by two techniques, laser-induced fluorescence (LIF) and optical emission, in order to test the validity of using the latter method as a way of determining relative changes in concentration of the ground-state radical. Both techniques were first used under steady-state conditions and then for measurements of time-resolved behavior f...

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Publication status:
Published

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Publisher copy:
10.1021/j100371a010

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Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Organic Chemistry
Role:
Author
Host title:
JOURNAL OF PHYSICAL CHEMISTRY
Volume:
94
Issue:
8
Pages:
3269-3272
Publication date:
1990-04-19
DOI:
EISSN:
1541-5740
ISSN:
0022-3654
Pubs id:
pubs:43406
UUID:
uuid:cb553c47-955f-4736-8c82-0197222ec2c0
Local pid:
pubs:43406
Source identifiers:
43406
Deposit date:
2012-12-19

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