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APPLICATIONS OF MBMS AND SURFACE SPECTROSCOPIC TECHNIQUES IN THE STUDY OF REACTION-MECHANISMS IN CBE - INVESTIGATIONS OF THE REACTIVITY OF TRITERTIARYBUTYLGALLIUM AND TRIISOBUTYLGALLIUM AS ALTERNATIVE PRECURSORS FOR EPILAYER GROWTH

Abstract:

Current approaches to the study of reaction mechanisms in CBE and investigations of the potential of triisobutylgallium and tritertiarybutylgallium as novel CBE precursors are reviewed. Surface spectroscopic techniques indicate that adsorbed iso-butyl radicals decompose to produce gaseous butene and hydrogen at significantly lower temperatures than in the corresponding process for ethyl radicals on GaAs, resulting in lowered growth temperatures and low temperature C incorporation levels in co...

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Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
Role:
Author
Volume:
120
Issue:
1-4
Pages:
103-113
Publication date:
1992-05-05
DOI:
ISSN:
0022-0248
URN:
uuid:c9f039b8-5fde-4e76-8860-f26c7210ca63
Source identifiers:
43921
Local pid:
pubs:43921

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