Conference item
APPLICATIONS OF MBMS AND SURFACE SPECTROSCOPIC TECHNIQUES IN THE STUDY OF REACTION-MECHANISMS IN CBE - INVESTIGATIONS OF THE REACTIVITY OF TRITERTIARYBUTYLGALLIUM AND TRIISOBUTYLGALLIUM AS ALTERNATIVE PRECURSORS FOR EPILAYER GROWTH
- Abstract:
-
Current approaches to the study of reaction mechanisms in CBE and investigations of the potential of triisobutylgallium and tritertiarybutylgallium as novel CBE precursors are reviewed. Surface spectroscopic techniques indicate that adsorbed iso-butyl radicals decompose to produce gaseous butene and hydrogen at significantly lower temperatures than in the corresponding process for ethyl radicals on GaAs, resulting in lowered growth temperatures and low temperature C incorporation levels in co...
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- Publication status:
- Published
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- Publisher copy:
- 10.1016/0022-0248(92)90372-P
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Bibliographic Details
- Volume:
- 120
- Issue:
- 1-4
- Pages:
- 103-113
- Host title:
- JOURNAL OF CRYSTAL GROWTH
- Publication date:
- 1992-05-01
- DOI:
- ISSN:
-
0022-0248
- Source identifiers:
-
43921
Item Description
- Pubs id:
-
pubs:43921
- UUID:
-
uuid:c9f039b8-5fde-4e76-8860-f26c7210ca63
- Local pid:
- pubs:43921
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 1992
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