- Abstract:
-
Current approaches to the study of reaction mechanisms in CBE and investigations of the potential of triisobutylgallium and tritertiarybutylgallium as novel CBE precursors are reviewed. Surface spectroscopic techniques indicate that adsorbed iso-butyl radicals decompose to produce gaseous butene and hydrogen at significantly lower temperatures than in the corresponding process for ethyl radicals on GaAs, resulting in lowered growth temperatures and low temperature C incorporation levels in co...
Expand abstract - Publication status:
- Published
- Publisher copy:
- 10.1016/0022-0248(92)90372-P
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- Volume:
- 120
- Issue:
- 1-4
- Pages:
- 103-113
- Publication date:
- 1992-05-05
- DOI:
- ISSN:
-
0022-0248
- URN:
-
uuid:c9f039b8-5fde-4e76-8860-f26c7210ca63
- Source identifiers:
-
43921
- Local pid:
- pubs:43921
- Copyright date:
- 1992
Conference
APPLICATIONS OF MBMS AND SURFACE SPECTROSCOPIC TECHNIQUES IN THE STUDY OF REACTION-MECHANISMS IN CBE - INVESTIGATIONS OF THE REACTIVITY OF TRITERTIARYBUTYLGALLIUM AND TRIISOBUTYLGALLIUM AS ALTERNATIVE PRECURSORS FOR EPILAYER GROWTH
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