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Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

Abstract:
A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.

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Publisher copy:
10.1116/1.1371317

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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Role:
Author
Journal:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume:
19
Issue:
3
Pages:
755-758
Publication date:
2001-05-05
DOI:
ISSN:
1071-1023
URN:
uuid:c3936e62-26a6-43cc-bfbb-a9885a0d9868
Source identifiers:
178050
Local pid:
pubs:178050

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