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Assessing the precision of strain measurements using electron backscatter diffraction--part 2: experimental demonstration.

Abstract:

The residual impression after performing a microhardness indent in silicon has been mapped with high resolution EBSD to reveal residual elastic strain and lattice rotation fields. Mapping of the same area has been performed with variable pattern binning and exposure times to reveal the qualitative and quantitative differences resulting from reducing the pattern size and exposure time. Two dimension 'image' plots of these fields indicate that qualitative assessment of the shape and size of the...

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Publication status:
Published

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Journal:
Ultramicroscopy
Volume:
135
Pages:
136-141
Publication date:
2013-12-05
DOI:
EISSN:
1879-2723
ISSN:
0304-3991
URN:
uuid:c093cec9-e2bc-49c5-9187-2cd634e4a492
Source identifiers:
429189
Local pid:
pubs:429189

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