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Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects

Abstract:

This study presents a detailed examination of the lattice distortions introduced by glancing incidence Focussed Ion Beam (FIB) milling. Using non-destructive multi-reflection Bragg coherent X-ray diffraction we probe damage formation in an initially pristine gold micro-crystal following several stages of FIB milling. These experiments allow access to the full lattice strain tensor in the micro-crystal with ∼25 nm 3D spatial resolution, enabling a nano-scale analysis of residual lattice strain...

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Publication status:
Published
Peer review status:
Peer reviewed
Version:
Accepted Manuscript

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Institution:
University of Oxford
Division:
MPLS Division
Department:
Engineering Science
Harder, RJ More by this author
Robinson, IK More by this author
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U.S. Department of Energy More from this funder
Publisher:
Elsevier Publisher's website
Journal:
Acta Materialia Journal website
Volume:
154
Pages:
113-123
Publication date:
2018-05-11
Acceptance date:
2018-05-09
DOI:
ISSN:
1359-6454
Pubs id:
pubs:848075
URN:
uri:bf6f90b7-5c6a-496c-8228-0961d2ef1289
UUID:
uuid:bf6f90b7-5c6a-496c-8228-0961d2ef1289
Local pid:
pubs:848075

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