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Journal article

Resonant interferometric lithography beyond the diffraction limit

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Publisher:
Optical Society of America
Journal:
Optics InfoBase Conference Papers
Publication date:
2009-01-01
EISSN:
2162-2701
URN:
uuid:bf6bd257-601f-417e-ae56-5c25d12b6425
Source identifiers:
464654
Local pid:
pubs:464654
Language:
English

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