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INVESTIGATION OF MODULATED RADIO-FREQUENCY PLASMA-ETCHING OF GAAS USING LANGMUIR PROBES

Publication status:
Published

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Publisher copy:
10.1116/1.587623

Authors


BRAITHWAITE, N More by this author
Volume:
12
Issue:
6
Pages:
3337-3341
Publication date:
1994
DOI:
ISSN:
0734-211X
URN:
uuid:bd946737-6a18-4cba-a44d-63b65b9ff53c
Source identifiers:
52990
Local pid:
pubs:52990

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