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CHEMICAL PRECURSORS FOR GAAS ETCHING WITH LOW-ENERGY ION-BEAMS - CHLORINE ADSORPTION ON GAAS(100)

Publication status:
Published

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Volume:
223
Pages:
215-220
Host title:
LOW ENERGY ION BEAM AND PLASMA MODIFICATION OF MATERIALS
Publication date:
1991-01-01
Source identifiers:
43491
ISBN:
1558991174
Pubs id:
pubs:43491
UUID:
uuid:b5c12642-e17c-49aa-a401-359fafec9a50
Local pid:
pubs:43491
Deposit date:
2012-12-19

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