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SURFACE-REACTION MECHANISMS IN CHEMICAL BEAM EPITAXY

Publication status:
Published

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Host title:
CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS II
Volume:
204
Pages:
3-13
Publication date:
1991-01-01
ISBN:
1558990968


Pubs id:
pubs:43490
UUID:
uuid:aefa3ce5-f55a-481e-b93c-23c1635d6c1c
Local pid:
pubs:43490
Source identifiers:
43490
Deposit date:
2012-12-19

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