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Integrating Philips' extreme UV source in the alpha-tools

Abstract:: The paper describes recent progress in the development of the Philips's EUV source. Progress has been realized at many frontiers: Integration studies of the source into a scanner have primarily been studied on the Xe source because it has a high degree of maturity. We report on integration with a collector, associated collector lifetime and optical characteristics. Collector lifetime in excess of 1 bln shots could be demonstrated. Next, an active dose control system was developed and tested o...
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Publication status:: Published

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APA Style

Pankert, J., Apetz, R., Bergmann, K., Derra, G., Janssen, M., Jonkers, J., Klein, J., Krucken, T., List, A., Loeken, M., Metzmacher, C., Neff, W., Probst, S., Prummer, R., Rosier, O., Seiwert, S., Siemons, G., Vaudrevange, D., Wagemann, D., … Zitzen, O. (2005). Integrating Philips' extreme UV source in the alpha-tools. Emerging Lithographic Technologies IX, Pts 1 and 2, 5751, 260–271.

MLA Style

Pankert, J., et al. “Integrating Philips' Extreme UV Source in the Alpha-Tools.” Emerging Lithographic Technologies IX, Pts 1 and 2, vol. 5751, 2005, pp. 260–71.

Chicago Style

Pankert, J, R Apetz, K Bergmann, G Derra, M Janssen, J Jonkers, J Klein, et al. 2005. “Integrating Philips' Extreme UV Source in the Alpha-Tools.” In Emerging Lithographic Technologies IX, Pts 1 and 2, 5751:260–71.
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Publisher copy:: 10.1117/12.598650

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+ Pankert, J More by this author

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+ Apetz, R More by this author

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+ Bergmann, K More by this author

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+ Derra, G More by this author

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+ Janssen, M More by this author

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Bibliographic Details

Journal:: Emerging Lithographic Technologies IX, Pts 1 and 2
Volume:: 5751
Pages:: 260-271
Publication date:: 2005-01-01
Event title:: Conference on Emerging Lithographic Technologies IX
DOI:: 10.1117/12.598650
ISSN:: 0277-786X
ISBN:: 0819457310

Item Description

Keywords:: EUV source

halogen cycle

EUV lithography

gas discharge plasma
Pubs id:: pubs:10685
UUID:: uuid:ad5f3121-0aa1-4d7e-b5d6-2774a0b172e8
Local pid:: pubs:10685
Source identifiers:: 10685
Deposit date:: 2012-12-19

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Copyright date:: 2005

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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