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Journal article

Assessment of lattice strain, rotation and dislocation content using electron back-scatter diffraction

Abstract:

Cross-correlation based analysis methods have been developed for electron back scatter diffraction (EBSD) patterns that improve the angular sensitivity to ∼10 -4 rads. This enables EBSD to be used to study the much smaller misorientations and even local elastic strain fields that are typical in semiconducting materials. Mapping of the lattice rotations and elastic strain variations provides sufficient detail for quantitative analysis of the threading dislocation densit...

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Authors


Wilkinson, AJ More by this author
Journal:
Journal of Physics: Conference Series
Volume:
326
Issue:
1
Publication date:
2011
DOI:
EISSN:
1742-6596
ISSN:
1742-6588
URN:
uuid:ab27d2a7-1345-46d8-a5b1-6401b77c10ac
Source identifiers:
306904
Local pid:
pubs:306904
Language:
English

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