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AN INVESTIGATION OF THE ADSORPTION AND DECOMPOSITION OF PH3 AND NH3 ON GAAS(100)

Abstract:

The adsorption and thermal decomposition of PH3 and NH3 on the Ga-rich GaAs(100)-(4 × 1) surface has been studied using temperature programmed desorption (TPD), Auger electron spectroscopy (AES) and high resolution electron loss spectroscopy (HREELS) techniques. At room temperature PH3 was found to chemisorb on the GaAs surface and HREELS and isotopic scrambling experiments using deuterium suggest the major species present is PH2. Electron beam irradiation brings about complete dissociation t...

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Publication status:
Published

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Journal:
SURFACE SCIENCE
Volume:
274
Issue:
3
Pages:
341-358
Publication date:
1992-08-15
DOI:
ISSN:
0039-6028
Language:
English
Pubs id:
pubs:43869
UUID:
uuid:a7efe2c5-1048-46c5-a6a8-a98759c96f8f
Local pid:
pubs:43869
Source identifiers:
43869
Deposit date:
2012-12-19

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