Journal article
A critical comparison between XRD and FIB residual stressmeasurement techniques in thin films
- Abstract:
-
Residual stress has a significant effect on the performance of thin films, in terms of adhesion, hardness, wear and fatigue resistance. Thus, when assessing innovative coatings or new deposition technologies, it is important to perform residual stress evaluation by means of a suitable and reliable technique.X-ray diffraction (XRD) is one of the commonly used techniques, because it is non-destructive, surface sensitive and phase selective. However, it is subject to certain limitations: X-ray d...
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- Publication status:
- Published
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- Publisher copy:
- 10.1016/j.tsf.2014.09.053
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Authors
Bibliographic Details
- Publisher:
- Elsevier
- Journal:
- THIN SOLID FILMS
- Volume:
- 572
- Pages:
- 224-231
- Publication date:
- 2014-12-01
- DOI:
- ISSN:
-
0040-6090
- Source identifiers:
-
489192
Item Description
- Language:
- English
- Keywords:
- Pubs id:
-
pubs:489192
- UUID:
-
uuid:a0cdd454-be74-4ce0-aa15-477bce8b66c2
- Local pid:
- pubs:489192
- Deposit date:
- 2015-02-25
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- Copyright date:
- 2014
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