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A critical comparison between XRD and FIB residual stressmeasurement techniques in thin films

Abstract:

Residual stress has a significant effect on the performance of thin films, in terms of adhesion, hardness, wear and fatigue resistance. Thus, when assessing innovative coatings or new deposition technologies, it is important to perform residual stress evaluation by means of a suitable and reliable technique.X-ray diffraction (XRD) is one of the commonly used techniques, because it is non-destructive, surface sensitive and phase selective. However, it is subject to certain limitations: X-ray d...

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Publication status:
Published

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Publisher copy:
10.1016/j.tsf.2014.09.053

Authors


Bemporad, E More by this author
Brisotto, M More by this author
Depero, LE More by this author
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Engineering Science
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Publisher:
Elsevier
Journal:
THIN SOLID FILMS
Volume:
572
Pages:
224-231
Publication date:
2014-12-01
DOI:
ISSN:
0040-6090
URN:
uuid:a0cdd454-be74-4ce0-aa15-477bce8b66c2
Source identifiers:
489192
Local pid:
pubs:489192

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