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Submicron IDT wave field investigation by scanning acoustic force microscopy

Abstract:

We report about a new technique for the investigation of SAW fields within SAW devices reaching submicron lateral resolution. The scanning acoustic force microscope (SAFM) is based on a standard force microscope and utilizes the nonlinear force curve in the sense of a mechanical diode. Varying wave amplitudes therefore lead to different shifts of the cantilever's rest position. With SAFM we investigated SAW devices with center frequencies above 600 MHz. We found a local effect of massloading ...

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Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Physics, Condensed Matter Physics
Role:
Author
Volume:
2
Pages:
815-818
Publication date:
1996-01-01
ISSN:
1051-0117
URN:
uuid:9ddc6133-1c36-4603-b24d-d785b823fc35
Source identifiers:
151527
Local pid:
pubs:151527
ISBN:
0-7803-3615-1

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