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Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopt, Part I: elastic scattering

Abstract:

A transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically scattered electrons. It is shown that there is no linear phase contrast in the confocal condition, leading to very low contrast for a single atom. Multislice simulations of a thicker crystalline sa...

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Publication status:
Published
Peer review status:
Peer reviewed

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Institution:
University of Oxford
Department:
Mathematical,Physical & Life Sciences Division - Materials
Role:
Author
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Institution:
University of Melbourne, Australia
Department:
School of Physics
Role:
Author
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Institution:
University of Melbourne, Australia
Department:
School of Physics
Role:
Author
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Institution:
"University of Melbourne, Australia", "University of Tokyo, Japan"
Department:
Institute of Engineering Innovation
Role:
Author
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Institution:
University of Oxford
Department:
Mathematical,Physical & Life Sciences Division - Materials
Role:
Author
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Funding agency for:
A. I. Kirkland
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Funding agency for:
P. D. Nellist
Publisher:
Elsevier Publisher's website
Journal:
Ultramicroscopy Journal website
Volume:
108
Issue:
12
Pages:
1558-1566
Publication date:
2008-11-05
DOI:
ISSN:
0304-3991
URN:
uuid:98bfa6e1-ef7e-4b00-8a42-b59ff2952a52
Local pid:
ora:3683

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