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Contamination of silicon by iron at temperatures below 800 degrees C

Abstract:

Iron-related defects are deleterious in silicon-based integrated circuits and photovoltaics, ruining devices and acting as strong recombination centres. Unless great care is taken, iron contamination will result from high temperature processing and so it is essential to understand the degree to which this can occur. Iron solubility data above ~800 °C have been summarised by Istratov et al. (Appl. Phys. A 69, 13 (1999)), but many processes are performed at lower temperatures for which solubili...

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Publication status:
Published

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Publisher copy:
10.1002/pssr.201105388

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Journal:
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
Volume:
5
Issue:
10-11
Pages:
370-372
Publication date:
2011-11-05
DOI:
EISSN:
1862-6270
ISSN:
1862-6254
URN:
uuid:9811f4b5-a666-406f-ba5d-bf5aa830b421
Source identifiers:
206274
Local pid:
pubs:206274
Language:
English
Keywords:

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