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Comprehensive characterization of a FEGTEM

Abstract:
Several improvements have been made in the methodology of determining imaging aberrations - especially three-fold astigmatism coma and spherical aberration - from measurements of image shifts and diffractogram shapes, to characterise a microscope recently installed in Oxford. The combined use of shift and diffractogram measurements has been develop to address tilt calibration problems, and a new approach based on simpler measurements devised.
Publication status:
Published

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Journal:
ELECTRON MICROSCOPY AND ANALYSIS 1999
Issue:
161
Pages:
259-262
Publication date:
1999-01-01
Event title:
Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute of Physics (EMAG 99)
ISSN:
0951-3248
Source identifiers:
7756
ISBN:
0750305770
Keywords:
Pubs id:
pubs:7756
UUID:
uuid:962a800d-1d16-4837-9ff0-feee872a2204
Local pid:
pubs:7756
Deposit date:
2012-12-19

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