====== Fe (1760) into Layer 1+particle+Layer 3  =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 1760  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+03 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
Layer  2 : particle
Layer Width =     5.E+01 A   Layer # 2- Density = 8.537E22 atoms/cm3 = 4.97 g/cm3
  Layer # 2-  Y = 18.1 Atomic Percent = 46.1 Mass Percent
  Layer # 2- Ti = 18.1 Atomic Percent = 24.8 Mass Percent
  Layer # 2-  O = 63.6 Atomic Percent = 29.0 Mass Percent
Layer  3 : Layer 3
Layer Width =     6.E+03 A   Layer # 3- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 3- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =10000.00
 Ion Average Range =   604.9E+01 A   Straggling =   158.5E+01 A
 Ion Lateral Range =   130.8E+01 A   Straggling =   163.6E+01 A
 Ion Radial  Range =   204.4E+01 A   Straggling =   107.6E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =2
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.6031  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.2785  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe          Y         Ti          O         Fe    
   (Ang.)       Ions     Tgt. Atoms  Tgt. Atoms  Tgt. Atoms  Tgt. Atoms  Tgt. Atoms
-----------  ----------  ----------  ----------  ----------  ----------  ----------
445151.E-02  2.0000E+04  5.5845E+07  0.0000E+00  6.6667E+03  4.6667E+04  2.6667E+04
445301.E-02  1.3333E+04  6.0244E+07  0.0000E+00  2.6667E+04  7.3333E+04  6.6667E+03
445451.E-02  1.3333E+04  6.5149E+07  6.6667E+03  1.3333E+04  8.0000E+04  6.6667E+03
445601.E-02  0.0000E+00  6.9508E+07  0.0000E+00  0.0000E+00  6.0000E+04  6.6667E+03
445751.E-02  1.3333E+04  7.2808E+07  1.3333E+04  1.3333E+04  7.3333E+04  6.6667E+03
445901.E-02  6.6667E+03  7.5940E+07  0.0000E+00  2.0000E+04  9.3333E+04  1.3333E+04
446051.E-02  2.0000E+04  7.6500E+07  6.6667E+03  2.0000E+04  1.0000E+05  1.3333E+04
446201.E-02  2.0000E+04  8.1186E+07  1.3333E+04  2.6667E+04  9.3333E+04  6.6667E+03
446351.E-02  2.0000E+04  8.2739E+07  2.0000E+04  6.6667E+03  9.3333E+04  2.6667E+04
446501.E-02  2.6667E+04  8.4433E+07  6.6667E+03  5.3333E+04  6.6667E+04  6.6667E+03
446651.E-02  0.0000E+00  8.6981E+07  6.6667E+03  3.3333E+04  1.2000E+05  1.3333E+04
446801.E-02  1.3333E+04  8.6354E+07  6.6667E+03  1.3333E+04  1.2000E+05  2.6667E+04
446951.E-02  0.0000E+00  9.0690E+07  4.0000E+04  4.0000E+04  1.4667E+05  1.3333E+04
447101.E-02  6.6667E+03  9.0316E+07  0.0000E+00  2.6667E+04  1.5333E+05  1.3333E+04
447251.E-02  6.6667E+03  9.2637E+07  2.0000E+04  2.6667E+04  1.2000E+05  1.3333E+04
447401.E-02  2.0000E+04  9.2657E+07  3.3333E+04  4.0000E+04  1.8667E+05  6.6667E+03
447551.E-02  1.3333E+04  9.6006E+07  2.0000E+04  5.3333E+04  1.0667E+05  2.0000E+04
447701.E-02  1.3333E+04  9.6346E+07  2.6667E+04  6.0000E+04  1.7333E+05  0.0000E+00
447851.E-02  3.3333E+04  9.7239E+07  6.6667E+03  2.6667E+04  3.0667E+05  3.3333E+04
448001.E-02  6.6667E+03  9.9901E+07  6.0000E+04  8.6667E+04  3.6000E+05  4.0000E+04
448151.E-02  4.6667E+04  9.9314E+07  4.0000E+04  5.3333E+04  3.2667E+05  3.3333E+04
448301.E-02  6.6667E+03  1.0094E+08  8.0000E+04  6.6667E+04  3.9333E+05  2.0000E+04
448451.E-02  1.3333E+04  1.0039E+08  8.6667E+04  8.0000E+04  3.7333E+05  3.3333E+04
448601.E-02  3.3333E+04  1.0111E+08  1.1333E+05  1.2000E+05  5.7333E+05  2.0000E+04
448751.E-02  6.6667E+03  1.0348E+08  1.4000E+05  1.0667E+05  7.4000E+05  4.0000E+04
448901.E-02  3.3333E+04  1.0252E+08  1.7333E+05  1.6667E+05  8.6667E+05  3.3333E+04
449051.E-02  1.3333E+04  1.0217E+08  2.4000E+05  2.1333E+05  1.3200E+06  2.0000E+04
449201.E-02  2.0000E+04  1.0024E+08  3.5333E+05  4.1333E+05  1.8467E+06  5.3333E+04
449351.E-02  0.0000E+00  9.8047E+07  6.4667E+05  5.4667E+05  2.5667E+06  6.6667E+04
449501.E-02  1.3333E+04  9.5352E+07  1.3267E+06  1.0267E+06  3.5000E+06  2.0000E+04
449651.E-02  2.0000E+04  8.8008E+07  1.9667E+06  1.8200E+06  5.2400E+06  8.0000E+04
449801.E-02  2.0000E+04  7.8873E+07  3.4333E+06  2.8667E+06  6.9867E+06  3.3333E+04
449951.E-02  2.0000E+04  6.5243E+07  4.9933E+06  4.4800E+06  8.9734E+06  8.0000E+04
450101.E-02  6.6667E+03  3.9595E+07  4.8200E+06  4.9466E+06  1.3747E+07  8.0000E+04
450251.E-02  0.0000E+00  2.8220E+07  5.0066E+06  5.3200E+06  1.6806E+07  6.0000E+04
450401.E-02  6.6667E+03  2.4253E+07  5.6600E+06  6.1267E+06  1.8180E+07  9.3333E+04
450551.E-02  6.6667E+03  1.9660E+07  6.1200E+06  6.7467E+06  1.9153E+07  8.6667E+04
450701.E-02  0.0000E+00  1.4160E+07  7.0467E+06  7.6800E+06  2.0273E+07  7.3333E+04
450851.E-02  2.0000E+04  9.6201E+06  7.2334E+06  7.7134E+06  2.0820E+07  1.1333E+05
451001.E-02  2.0000E+04  6.3667E+06  7.6334E+06  7.8801E+06  2.2066E+07  9.3333E+04
451151.E-02  1.3333E+04  4.5600E+06  7.7400E+06  8.2601E+06  2.3206E+07  1.1333E+05
451301.E-02  0.0000E+00  3.0400E+06  8.2867E+06  8.3734E+06  2.3126E+07  6.0000E+04
451451.E-02  6.6667E+03  1.9533E+06  7.9734E+06  8.3867E+06  2.3240E+07  1.8667E+05
451601.E-02  0.0000E+00  1.4533E+06  8.1934E+06  8.2601E+06  2.3333E+07  1.2667E+05
451751.E-02  6.6667E+03  1.1067E+06  8.0667E+06  8.3334E+06  2.4007E+07  1.7333E+05
451901.E-02  6.6667E+03  9.6667E+05  7.8067E+06  8.7467E+06  2.4127E+07  1.6000E+05
452051.E-02  0.0000E+00  7.8667E+05  8.3134E+06  8.4534E+06  2.3620E+07  1.4000E+05
452201.E-02  0.0000E+00  7.2667E+05  8.0001E+06  8.4867E+06  2.3787E+07  2.6000E+05
452351.E-02  0.0000E+00  5.2000E+05  8.5334E+06  8.9268E+06  2.3740E+07  2.7333E+05
452501.E-02  3.3333E+04  3.8667E+05  8.1534E+06  9.0201E+06  2.3907E+07  3.6667E+05
452651.E-02  6.6667E+03  4.0667E+05  8.4801E+06  8.5734E+06  2.3380E+07  3.1333E+05
452801.E-02  6.6667E+03  4.1333E+05  8.0801E+06  8.6267E+06  2.3893E+07  3.6667E+05
452951.E-02  6.6667E+03  3.0000E+05  8.2201E+06  8.5467E+06  2.3573E+07  4.6667E+05
453101.E-02  1.3333E+04  3.0667E+05  8.4601E+06  8.4334E+06  2.4193E+07  5.4000E+05
453251.E-02  6.6667E+03  2.4000E+05  8.5867E+06  8.2467E+06  2.3820E+07  7.2000E+05
453401.E-02  0.0000E+00  1.6000E+05  8.5601E+06  8.7001E+06  2.4460E+07  1.0000E+06
453551.E-02  0.0000E+00  2.3333E+05  8.5534E+06  8.0001E+06  2.4333E+07  1.2200E+06
453701.E-02  6.6667E+03  1.9333E+05  8.1934E+06  8.3534E+06  2.4027E+07  1.8467E+06
453851.E-02  6.6667E+03  2.4667E+05  8.4067E+06  8.6067E+06  2.4060E+07  2.4533E+06
454001.E-02  6.6667E+03  1.4000E+05  8.0534E+06  8.8801E+06  2.4273E+07  4.1800E+06
454151.E-02  2.0000E+04  1.6667E+05  8.1667E+06  8.6267E+06  2.3140E+07  6.2133E+06
454301.E-02  6.6667E+03  1.4667E+05  7.7067E+06  8.4334E+06  2.3160E+07  8.8667E+06
454451.E-02  1.3333E+04  6.6667E+04  7.4734E+06  8.4134E+06  2.1746E+07  1.3173E+07
454601.E-02  6.6667E+03  1.6000E+05  6.5600E+06  7.0467E+06  2.1300E+07  1.8386E+07
454751.E-02  1.3333E+04  1.0667E+05  6.4667E+06  6.8800E+06  2.0386E+07  2.2633E+07
454901.E-02  6.6667E+03  1.2000E+05  5.8400E+06  6.1333E+06  1.9180E+07  2.7127E+07
455051.E-02  0.0000E+00  6.6667E+04  5.9000E+06  6.1867E+06  1.6206E+07  3.9468E+07
455201.E-02  6.6667E+03  1.5333E+05  6.1067E+06  5.3333E+06  1.0460E+07  6.7536E+07
455351.E-02  2.0000E+04  1.5333E+05  3.9600E+06  3.3000E+06  8.4001E+06  8.0066E+07
455501.E-02  0.0000E+00  9.3333E+04  2.4067E+06  2.2600E+06  6.1933E+06  9.2237E+07
455651.E-02  4.0000E+04  1.0667E+05  1.5533E+06  1.2600E+06  4.2000E+06  1.0206E+08
455801.E-02  6.6667E+03  1.0000E+05  8.4667E+05  7.8667E+05  3.0600E+06  1.0686E+08
455951.E-02  0.0000E+00  1.2000E+05  7.1333E+05  5.4000E+05  2.2733E+06  1.1089E+08
456101.E-02  2.0000E+04  9.3333E+04  4.5333E+05  3.6000E+05  1.5667E+06  1.1415E+08
456251.E-02  6.6667E+03  8.0000E+04  2.7333E+05  3.1333E+05  1.3667E+06  1.1771E+08
456401.E-02  0.0000E+00  6.6667E+04  1.5333E+05  2.6000E+05  9.2000E+05  1.1844E+08
456551.E-02  2.6667E+04  2.6667E+04  7.3333E+04  1.5333E+05  7.8000E+05  1.2000E+08
456701.E-02  6.6667E+03  8.6667E+04  1.6000E+05  1.2000E+05  6.9333E+05  1.1880E+08
456851.E-02  2.0000E+04  6.6667E+04  1.2667E+05  1.2000E+05  6.4667E+05  1.2130E+08
457001.E-02  2.0000E+04  3.3333E+04  9.3333E+04  1.0000E+05  4.0000E+05  1.1971E+08
457151.E-02  6.6667E+03  4.0000E+04  1.0000E+05  4.6667E+04  4.5333E+05  1.2116E+08
457301.E-02  6.6667E+03  7.3333E+04  8.0000E+04  8.0000E+04  2.7333E+05  1.1962E+08
457451.E-02  1.3333E+04  6.0000E+04  3.3333E+04  4.6667E+04  3.1333E+05  1.1982E+08
457601.E-02  3.3333E+04  4.0000E+04  6.0000E+04  8.0000E+04  2.6000E+05  1.2107E+08
457751.E-02  6.6667E+03  2.6667E+04  5.3333E+04  9.3333E+04  2.9333E+05  1.2016E+08
457901.E-02  2.0000E+04  4.6667E+04  4.0000E+04  1.3333E+04  1.9333E+05  1.1917E+08
458051.E-02  1.3333E+04  6.6667E+04  4.0000E+04  5.3333E+04  1.9333E+05  1.1974E+08
458201.E-02  2.6667E+04  5.3333E+04  4.0000E+04  4.6667E+04  1.6667E+05  1.2080E+08
458351.E-02  1.3333E+04  1.3333E+04  5.3333E+04  3.3333E+04  1.4667E+05  1.1934E+08
458501.E-02  2.0000E+04  5.3333E+04  2.6667E+04  4.6667E+04  1.1333E+05  1.1777E+08
458651.E-02  1.3333E+04  0.0000E+00  2.6667E+04  6.6667E+03  2.1333E+05  1.1798E+08
458801.E-02  0.0000E+00  2.6667E+04  3.3333E+04  4.6667E+04  1.2000E+05  1.1630E+08
458951.E-02  0.0000E+00  2.0000E+04  6.6667E+03  6.6667E+03  1.2667E+05  1.1616E+08
459101.E-02  0.0000E+00  2.6667E+04  2.6667E+04  3.3333E+04  1.1333E+05  1.1261E+08
459251.E-02  1.3333E+04  4.0000E+04  2.6667E+04  2.0000E+04  1.0000E+05  1.1045E+08
459401.E-02  6.6667E+03  3.3333E+04  0.0000E+00  4.6667E+04  1.2000E+05  1.0796E+08
459551.E-02  1.3333E+04  2.6667E+04  6.6667E+03  1.3333E+04  1.4000E+05  1.0504E+08
459701.E-02  2.0000E+04  2.6667E+04  2.0000E+04  6.6667E+03  8.0000E+04  1.0254E+08
459851.E-02  6.6667E+03  3.3333E+04  2.6667E+04  6.6667E+03  1.0000E+05  9.9180E+07
460001.E-02  2.0000E+04  6.6667E+03  1.3333E+04  0.0000E+00  8.6667E+04  9.5825E+07
