====== Fe (1760) into Layer 1+particle+Layer 3  =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 1760  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+03 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
Layer  2 : particle
Layer Width =     5.E+01 A   Layer # 2- Density = 8.537E22 atoms/cm3 = 4.97 g/cm3
  Layer # 2-  Y = 18.1 Atomic Percent = 46.1 Mass Percent
  Layer # 2- Ti = 18.1 Atomic Percent = 24.8 Mass Percent
  Layer # 2-  O = 63.6 Atomic Percent = 29.0 Mass Percent
Layer  3 : Layer 3
Layer Width =     6.E+03 A   Layer # 3- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 3- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =10000.00
 Ion Average Range =   604.9E+01 A   Straggling =   158.5E+01 A
 Ion Lateral Range =   130.8E+01 A   Straggling =   163.6E+01 A
 Ion Radial  Range =   204.4E+01 A   Straggling =   107.6E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =2
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.6031  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.2785  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe          Y         Ti          O         Fe    
   (Ang.)       Ions     Tgt. Atoms  Tgt. Atoms  Tgt. Atoms  Tgt. Atoms  Tgt. Atoms
-----------  ----------  ----------  ----------  ----------  ----------  ----------
445151.E-02  2.0000E+04  5.5925E+07  0.0000E+00  2.0000E+04  7.3333E+04  6.6667E+03
445301.E-02  1.3333E+04  6.0930E+07  6.6667E+03  1.3333E+04  6.6667E+04  0.0000E+00
445451.E-02  1.3333E+04  6.5023E+07  6.6667E+03  6.6667E+03  8.0000E+04  6.6667E+03
445601.E-02  0.0000E+00  6.8449E+07  0.0000E+00  6.6667E+03  7.3333E+04  0.0000E+00
445751.E-02  1.3333E+04  7.2428E+07  1.3333E+04  2.6667E+04  8.0000E+04  6.6667E+03
445901.E-02  6.6667E+03  7.5274E+07  1.3333E+04  1.3333E+04  8.0000E+04  2.0000E+04
446051.E-02  2.0000E+04  7.4720E+07  1.3333E+04  2.0000E+04  1.0667E+05  2.0000E+04
446201.E-02  2.0000E+04  8.0239E+07  6.6667E+03  3.3333E+04  8.0000E+04  6.6667E+03
446351.E-02  2.0000E+04  8.1799E+07  1.3333E+04  1.3333E+04  1.1333E+05  2.6667E+04
446501.E-02  2.6667E+04  8.4233E+07  0.0000E+00  5.3333E+04  1.0000E+05  6.6667E+03
446651.E-02  0.0000E+00  8.6087E+07  6.6667E+03  2.0000E+04  9.3333E+04  1.3333E+04
446801.E-02  1.3333E+04  8.7308E+07  0.0000E+00  1.3333E+04  1.2667E+05  2.6667E+04
446951.E-02  0.0000E+00  9.0750E+07  2.0000E+04  4.0000E+04  1.4000E+05  1.3333E+04
447101.E-02  6.6667E+03  9.0103E+07  0.0000E+00  3.3333E+04  1.7333E+05  6.6667E+03
447251.E-02  6.6667E+03  9.2904E+07  2.6667E+04  4.0000E+04  1.8000E+05  6.6667E+03
447401.E-02  2.0000E+04  9.1730E+07  2.0000E+04  2.0000E+04  2.0000E+05  6.6667E+03
447551.E-02  1.3333E+04  9.6299E+07  6.6667E+03  1.3333E+04  1.6000E+05  2.0000E+04
447701.E-02  1.3333E+04  9.6006E+07  1.3333E+04  4.0000E+04  1.9333E+05  2.0000E+04
447851.E-02  3.3333E+04  9.8340E+07  1.3333E+04  4.0000E+04  2.2000E+05  3.3333E+04
448001.E-02  6.6667E+03  9.9267E+07  5.3333E+04  4.6667E+04  2.8667E+05  3.3333E+04
448151.E-02  4.6667E+04  9.9901E+07  4.6667E+04  6.6667E+04  3.4000E+05  2.0000E+04
448301.E-02  6.6667E+03  1.0076E+08  4.6667E+04  3.3333E+04  4.2667E+05  2.6667E+04
448451.E-02  1.3333E+04  1.0129E+08  6.0000E+04  1.0000E+05  4.3333E+05  3.3333E+04
448601.E-02  3.3333E+04  1.0186E+08  8.0000E+04  1.2667E+05  6.6000E+05  1.3333E+04
448751.E-02  6.6667E+03  1.0204E+08  1.8667E+05  1.0667E+05  7.5333E+05  3.3333E+04
448901.E-02  3.3333E+04  1.0202E+08  1.9333E+05  1.9333E+05  8.8000E+05  4.0000E+04
449051.E-02  1.3333E+04  1.0205E+08  3.0667E+05  2.8667E+05  1.3333E+06  3.3333E+04
449201.E-02  2.0000E+04  1.0003E+08  3.4667E+05  3.6667E+05  1.9800E+06  6.0000E+04
449351.E-02  0.0000E+00  9.8327E+07  7.2000E+05  5.7333E+05  3.1867E+06  6.0000E+04
449501.E-02  1.3333E+04  9.3351E+07  1.4867E+06  9.6000E+05  5.1266E+06  2.0000E+04
449651.E-02  2.0000E+04  8.7095E+07  2.4133E+06  2.1333E+06  9.7534E+06  5.3333E+04
449801.E-02  2.0000E+04  7.7480E+07  4.7333E+06  4.1067E+06  1.7566E+07  6.0000E+04
449951.E-02  2.0000E+04  6.4756E+07  7.7534E+06  6.9867E+06  3.0127E+07  9.3333E+04
450101.E-02  6.6667E+03  3.8302E+07  7.9201E+06  8.6201E+06  5.2779E+07  7.3333E+04
450251.E-02  0.0000E+00  2.7954E+07  8.0401E+06  9.4601E+06  7.1195E+07  6.0000E+04
450401.E-02  6.6667E+03  2.3153E+07  9.7334E+06  1.0920E+07  7.9146E+07  7.3333E+04
450551.E-02  6.6667E+03  1.9160E+07  1.0693E+07  1.2307E+07  8.6307E+07  6.0000E+04
450701.E-02  0.0000E+00  1.4633E+07  1.1767E+07  1.3013E+07  9.0510E+07  5.3333E+04
450851.E-02  2.0000E+04  9.2801E+06  1.2820E+07  1.3800E+07  9.3965E+07  1.3333E+05
451001.E-02  2.0000E+04  6.3667E+06  1.3287E+07  1.4367E+07  9.5105E+07  7.3333E+04
451151.E-02  1.3333E+04  4.6600E+06  1.3453E+07  1.4580E+07  9.4311E+07  1.2667E+05
451301.E-02  0.0000E+00  3.1667E+06  1.3907E+07  1.4707E+07  9.4298E+07  8.6667E+04
451451.E-02  6.6667E+03  2.0600E+06  1.3373E+07  1.4473E+07  9.3584E+07  1.7333E+05
451601.E-02  0.0000E+00  1.6267E+06  1.3420E+07  1.4173E+07  9.3284E+07  1.6667E+05
451751.E-02  6.6667E+03  1.1133E+06  1.3507E+07  1.4440E+07  9.3891E+07  1.3333E+05
451901.E-02  6.6667E+03  8.8000E+05  1.3300E+07  1.4080E+07  9.3831E+07  1.6000E+05
452051.E-02  0.0000E+00  7.7333E+05  1.3467E+07  1.4173E+07  9.2137E+07  1.4667E+05
452201.E-02  0.0000E+00  6.2667E+05  1.3260E+07  1.4080E+07  9.2937E+07  2.5333E+05
452351.E-02  0.0000E+00  5.9333E+05  1.3213E+07  1.3753E+07  9.2584E+07  2.2000E+05
452501.E-02  3.3333E+04  4.5333E+05  1.3860E+07  1.4280E+07  9.3718E+07  3.4667E+05
452651.E-02  6.6667E+03  3.6667E+05  1.3407E+07  1.3973E+07  9.2084E+07  2.5333E+05
452801.E-02  6.6667E+03  4.2000E+05  1.3287E+07  1.4013E+07  9.1657E+07  3.4000E+05
452951.E-02  6.6667E+03  3.5333E+05  1.3473E+07  1.3947E+07  9.4151E+07  4.7333E+05
453101.E-02  1.3333E+04  2.5333E+05  1.3840E+07  1.4187E+07  9.2911E+07  5.3333E+05
453251.E-02  6.6667E+03  2.9333E+05  1.3587E+07  1.4060E+07  9.3658E+07  7.1333E+05
453401.E-02  0.0000E+00  1.4667E+05  1.3727E+07  1.4287E+07  9.4798E+07  1.0067E+06
453551.E-02  0.0000E+00  2.0667E+05  1.4080E+07  1.4793E+07  9.5559E+07  1.3400E+06
453701.E-02  6.6667E+03  2.0000E+05  1.3427E+07  1.4420E+07  9.5865E+07  1.6867E+06
453851.E-02  6.6667E+03  2.8000E+05  1.4520E+07  1.5306E+07  9.6006E+07  2.6067E+06
454001.E-02  6.6667E+03  1.3333E+05  1.4387E+07  1.5153E+07  9.7966E+07  4.1000E+06
454151.E-02  2.0000E+04  1.6667E+05  1.3927E+07  1.5440E+07  9.9267E+07  6.1867E+06
454301.E-02  6.6667E+03  1.2000E+05  1.3233E+07  1.4847E+07  9.8433E+07  8.9001E+06
454451.E-02  1.3333E+04  8.6667E+04  1.3160E+07  1.4180E+07  1.0051E+08  1.3840E+07
454601.E-02  6.6667E+03  1.4000E+05  1.1800E+07  1.3887E+07  9.4165E+07  1.8640E+07
454751.E-02  1.3333E+04  1.0667E+05  1.0580E+07  1.2580E+07  8.8262E+07  2.3200E+07
454901.E-02  6.6667E+03  1.0667E+05  9.7868E+06  1.0720E+07  7.9126E+07  2.7054E+07
455051.E-02  0.0000E+00  8.6667E+04  9.5201E+06  1.0293E+07  6.2183E+07  3.8555E+07
455201.E-02  6.6667E+03  1.5333E+05  8.7867E+06  8.2467E+06  3.6001E+07  6.6389E+07
455351.E-02  2.0000E+04  1.6667E+05  5.5666E+06  4.8800E+06  2.1146E+07  8.0286E+07
455501.E-02  0.0000E+00  1.1333E+05  3.3733E+06  2.7333E+06  1.0887E+07  9.2157E+07
455651.E-02  4.0000E+04  1.1333E+05  1.7533E+06  1.2400E+06  6.3600E+06  1.0193E+08
455801.E-02  6.6667E+03  1.2667E+05  1.0667E+06  7.6667E+05  3.8733E+06  1.0881E+08
455951.E-02  0.0000E+00  1.0667E+05  6.0667E+05  4.7333E+05  2.4333E+06  1.1055E+08
456101.E-02  2.0000E+04  6.6667E+04  4.1333E+05  3.9333E+05  1.8933E+06  1.1435E+08
456251.E-02  6.6667E+03  6.6667E+04  2.6667E+05  3.2667E+05  1.1600E+06  1.1836E+08
456401.E-02  0.0000E+00  6.6667E+04  1.9333E+05  2.0667E+05  9.5333E+05  1.1866E+08
456551.E-02  2.6667E+04  5.3333E+04  8.6667E+04  1.0667E+05  8.0667E+05  1.1952E+08
456701.E-02  6.6667E+03  8.0000E+04  1.3333E+05  1.2000E+05  6.8000E+05  1.2173E+08
456851.E-02  2.0000E+04  7.3333E+04  1.2000E+05  1.3333E+05  5.7333E+05  1.2187E+08
457001.E-02  2.0000E+04  3.3333E+04  1.0000E+05  8.0000E+04  4.2000E+05  1.2097E+08
457151.E-02  6.6667E+03  4.6667E+04  1.1333E+05  4.0000E+04  4.8667E+05  1.2201E+08
457301.E-02  6.6667E+03  4.6667E+04  9.3333E+04  6.0000E+04  3.0667E+05  1.2129E+08
457451.E-02  1.3333E+04  6.0000E+04  4.6667E+04  4.0000E+04  3.7333E+05  1.2187E+08
457601.E-02  3.3333E+04  3.3333E+04  6.0000E+04  6.6667E+04  2.0000E+05  1.2178E+08
457751.E-02  6.6667E+03  2.0000E+04  6.0000E+04  1.0000E+05  3.2667E+05  1.2117E+08
457901.E-02  2.0000E+04  4.6667E+04  5.3333E+04  4.0000E+04  1.8667E+05  1.1970E+08
458051.E-02  1.3333E+04  6.0000E+04  3.3333E+04  5.3333E+04  2.0000E+05  1.2105E+08
458201.E-02  2.6667E+04  4.0000E+04  2.0000E+04  6.0000E+04  1.8000E+05  1.2076E+08
458351.E-02  1.3333E+04  2.0000E+04  5.3333E+04  4.0000E+04  1.3333E+05  1.2080E+08
458501.E-02  2.0000E+04  4.6667E+04  3.3333E+04  3.3333E+04  1.5333E+05  1.1870E+08
458651.E-02  1.3333E+04  0.0000E+00  3.3333E+04  0.0000E+00  1.8000E+05  1.1791E+08
458801.E-02  0.0000E+00  3.3333E+04  2.6667E+04  6.6667E+04  1.0667E+05  1.1433E+08
458951.E-02  0.0000E+00  2.6667E+04  6.6667E+03  6.6667E+03  1.2000E+05  1.1575E+08
459101.E-02  0.0000E+00  3.3333E+04  2.0000E+04  2.6667E+04  1.4667E+05  1.1173E+08
459251.E-02  1.3333E+04  3.3333E+04  2.0000E+04  4.0000E+04  1.1333E+05  1.1008E+08
459401.E-02  6.6667E+03  4.0000E+04  1.3333E+04  4.0000E+04  8.6667E+04  1.0726E+08
459551.E-02  1.3333E+04  3.3333E+04  6.6667E+03  6.6667E+03  1.2667E+05  1.0396E+08
459701.E-02  2.0000E+04  2.0000E+04  2.0000E+04  0.0000E+00  1.3333E+05  1.0169E+08
459851.E-02  6.6667E+03  3.3333E+04  3.3333E+04  1.3333E+04  8.6667E+04  9.8580E+07
460001.E-02  2.0000E+04  6.6667E+03  2.6667E+04  0.0000E+00  8.0000E+04  9.5092E+07
