====== Fe (1760) into Layer 1+particle+Layer 3  =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 1760  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+03 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
Layer  2 : particle
Layer Width =     3.E+01 A   Layer # 2- Density = 8.537E22 atoms/cm3 = 4.97 g/cm3
  Layer # 2-  Y = 18.1 Atomic Percent = 46.1 Mass Percent
  Layer # 2- Ti = 18.1 Atomic Percent = 24.8 Mass Percent
  Layer # 2-  O = 63.6 Atomic Percent = 29.0 Mass Percent
Layer  3 : Layer 3
Layer Width =     6.E+03 A   Layer # 3- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 3- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =10000.00
 Ion Average Range =   606.3E+01 A   Straggling =   156.8E+01 A
 Ion Lateral Range =   129.3E+01 A   Straggling =   162.0E+01 A
 Ion Radial  Range =   202.6E+01 A   Straggling =   105.6E+01 A
====================================================================
 Range Skewne- = -000.6032  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.3331  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe          Y         Ti          O         Fe    
   (Ang.)       Ions     Tgt. Atoms  Tgt. Atoms  Tgt. Atoms  Tgt. Atoms  Tgt. Atoms
-----------  ----------  ----------  ----------  ----------  ----------  ----------
445131.E-02  0.0000E+00  5.0631E+07  7.6923E+03  1.5385E+04  5.3846E+04  2.3077E+04
445261.E-02  1.5385E+04  5.5522E+07  0.0000E+00  0.0000E+00  6.9231E+04  7.6923E+03
445391.E-02  0.0000E+00  5.8852E+07  0.0000E+00  0.0000E+00  5.3846E+04  7.6923E+03
445521.E-02  1.5385E+04  6.1766E+07  7.6923E+03  7.6923E+03  6.1538E+04  3.0769E+04
445651.E-02  7.6923E+03  6.4581E+07  0.0000E+00  0.0000E+00  6.1538E+04  7.6923E+03
445781.E-02  1.5385E+04  6.7773E+07  0.0000E+00  0.0000E+00  4.6154E+04  2.3077E+04
445911.E-02  2.3077E+04  6.8872E+07  0.0000E+00  7.6923E+03  6.1538E+04  7.6923E+03
446041.E-02  7.6923E+03  7.3348E+07  1.5385E+04  7.6923E+03  6.1538E+04  7.6923E+03
446171.E-02  2.3077E+04  7.5025E+07  7.6923E+03  7.6923E+03  3.0769E+04  7.6923E+03
446301.E-02  7.6923E+03  7.6509E+07  7.6923E+03  7.6923E+03  7.6923E+04  7.6923E+03
446431.E-02  2.3077E+04  8.0385E+07  1.5385E+04  7.6923E+03  6.1538E+04  3.0769E+04
446561.E-02  3.8462E+04  8.1969E+07  0.0000E+00  3.0769E+04  1.3846E+05  3.0769E+04
446691.E-02  7.6923E+03  8.2923E+07  0.0000E+00  7.6923E+03  1.3846E+05  4.6154E+04
446821.E-02  3.0769E+04  8.4031E+07  0.0000E+00  7.6923E+03  9.2308E+04  3.8462E+04
446951.E-02  7.6923E+03  8.6379E+07  7.6923E+03  7.6923E+03  1.1538E+05  5.3846E+04
447081.E-02  2.3077E+04  8.6771E+07  0.0000E+00  3.0769E+04  1.0000E+05  2.3077E+04
447211.E-02  2.3077E+04  8.9372E+07  7.6923E+03  1.5385E+04  1.1538E+05  5.3846E+04
447341.E-02  3.0769E+04  9.0657E+07  0.0000E+00  3.8462E+04  1.4615E+05  6.1538E+04
447471.E-02  7.6923E+03  9.3004E+07  1.5385E+04  3.0769E+04  2.4615E+05  7.6923E+03
447601.E-02  3.0769E+04  9.2335E+07  4.6154E+04  3.8462E+04  1.3077E+05  3.8462E+04
447731.E-02  1.5385E+04  9.3828E+07  1.5385E+04  4.6154E+04  1.8462E+05  2.3077E+04
447861.E-02  7.6923E+03  9.5913E+07  2.3077E+04  3.8462E+04  2.2308E+05  3.0769E+04
447991.E-02  7.6923E+03  9.7175E+07  8.4615E+04  3.0769E+04  2.6923E+05  5.3846E+04
448121.E-02  0.0000E+00  9.8360E+07  5.3846E+04  3.8462E+04  2.6923E+05  3.8462E+04
448251.E-02  1.5385E+04  9.9938E+07  2.3077E+04  5.3846E+04  3.5385E+05  2.3077E+04
448381.E-02  7.6923E+03  9.9476E+07  8.4615E+04  5.3846E+04  4.7692E+05  6.9231E+04
448511.E-02  1.5385E+04  9.8553E+07  9.2308E+04  6.1538E+04  5.1538E+05  3.8462E+04
448641.E-02  7.6923E+03  1.0310E+08  1.0000E+05  1.0769E+05  6.5385E+05  6.1538E+04
448771.E-02  1.5385E+04  1.0164E+08  1.5385E+05  1.3846E+05  7.7692E+05  8.4615E+04
448901.E-02  7.6923E+03  1.0206E+08  9.2308E+04  1.3077E+05  9.6154E+05  4.6154E+04
449031.E-02  2.3077E+04  1.0090E+08  2.0769E+05  1.6923E+05  1.3154E+06  1.0769E+05
449161.E-02  7.6923E+03  1.0177E+08  3.6154E+05  3.3846E+05  1.6846E+06  9.2308E+04
449291.E-02  2.3077E+04  9.7252E+07  6.7692E+05  4.1538E+05  2.5154E+06  1.3077E+05
449421.E-02  1.5385E+04  9.6806E+07  9.1539E+05  8.9231E+05  3.9692E+06  1.3846E+05
449551.E-02  1.5385E+04  9.0726E+07  1.8077E+06  1.5615E+06  6.5307E+06  2.0000E+05
449681.E-02  0.0000E+00  8.3939E+07  3.1615E+06  2.4846E+06  1.1015E+07  1.3846E+05
449811.E-02  1.5385E+04  7.5125E+07  5.4461E+06  4.7154E+06  1.8931E+07  2.3846E+05
449941.E-02  0.0000E+00  6.4358E+07  7.4615E+06  7.2461E+06  3.1217E+07  2.3846E+05
450071.E-02  0.0000E+00  4.1794E+07  8.6769E+06  8.3615E+06  4.9192E+07  2.0000E+05
450201.E-02  0.0000E+00  2.7078E+07  8.0461E+06  9.2153E+06  6.7065E+07  2.6154E+05
450331.E-02  2.3077E+04  2.5063E+07  9.3692E+06  1.0692E+07  7.3294E+07  2.5385E+05
450461.E-02  3.0769E+04  2.0601E+07  9.8692E+06  1.1962E+07  8.2162E+07  2.6923E+05
450591.E-02  7.6923E+03  1.6370E+07  1.1008E+07  1.2469E+07  8.7464E+07  4.3846E+05
450721.E-02  0.0000E+00  1.2785E+07  1.1715E+07  1.2692E+07  9.0965E+07  3.7692E+05
450851.E-02  0.0000E+00  9.1923E+06  1.2346E+07  1.3785E+07  9.2904E+07  4.5385E+05
450981.E-02  7.6923E+03  6.6307E+06  1.3131E+07  1.4616E+07  9.3150E+07  4.7692E+05
451111.E-02  7.6923E+03  4.5231E+06  1.3800E+07  1.3977E+07  9.2596E+07  5.1538E+05
451241.E-02  1.5385E+04  3.1846E+06  1.3731E+07  1.3923E+07  9.3304E+07  5.9231E+05
451371.E-02  0.0000E+00  2.3154E+06  1.3185E+07  1.4793E+07  9.3751E+07  8.0769E+05
451501.E-02  7.6923E+03  1.6846E+06  1.3839E+07  1.4116E+07  9.1673E+07  1.0846E+06
451631.E-02  7.6923E+03  1.4769E+06  1.3277E+07  1.4485E+07  9.1550E+07  1.3077E+06
451761.E-02  7.6923E+03  9.8462E+05  1.3408E+07  1.3869E+07  9.1965E+07  2.0538E+06
451891.E-02  0.0000E+00  8.5385E+05  1.3331E+07  1.4646E+07  9.1465E+07  2.5154E+06
452021.E-02  7.6923E+03  5.9231E+05  1.3985E+07  1.4454E+07  9.2473E+07  4.1154E+06
452151.E-02  0.0000E+00  6.8462E+05  1.3146E+07  1.3939E+07  9.3512E+07  5.6077E+06
452281.E-02  7.6923E+03  4.4615E+05  1.2669E+07  1.4069E+07  9.3358E+07  8.2769E+06
452411.E-02  0.0000E+00  4.1538E+05  1.2231E+07  1.3369E+07  9.2196E+07  1.0877E+07
452541.E-02  7.6923E+03  4.2308E+05  1.1377E+07  1.2408E+07  9.0111E+07  1.4846E+07
452671.E-02  0.0000E+00  3.9231E+05  1.0777E+07  1.1969E+07  8.5263E+07  1.8677E+07
452801.E-02  7.6923E+03  4.0000E+05  1.0015E+07  1.0638E+07  7.8255E+07  2.2539E+07
452931.E-02  1.5385E+04  3.1538E+05  8.7000E+06  9.6769E+06  7.1433E+07  2.5778E+07
453061.E-02  1.5385E+04  3.2308E+05  9.5000E+06  9.5153E+06  5.2999E+07  3.9033E+07
453191.E-02  7.6923E+03  3.3846E+05  8.7461E+06  7.5461E+06  3.3417E+07  6.0421E+07
453321.E-02  0.0000E+00  3.1538E+05  5.9923E+06  4.8000E+06  2.0816E+07  7.2471E+07
453451.E-02  0.0000E+00  3.0769E+05  3.4538E+06  2.6692E+06  1.1823E+07  8.3362E+07
453581.E-02  7.6923E+03  2.6154E+05  2.4769E+06  1.8385E+06  7.1538E+06  9.0403E+07
453711.E-02  2.3077E+04  1.8462E+05  1.2077E+06  1.0846E+06  4.4538E+06  9.4420E+07
453841.E-02  0.0000E+00  1.7692E+05  7.7692E+05  7.0769E+05  2.7308E+06  1.0021E+08
453971.E-02  7.6923E+03  1.6923E+05  5.7692E+05  4.2308E+05  2.0385E+06  1.0255E+08
454101.E-02  1.5385E+04  1.8462E+05  4.0000E+05  2.8462E+05  1.5692E+06  1.0491E+08
454231.E-02  3.8462E+04  1.0769E+05  3.3077E+05  1.8462E+05  1.0615E+06  1.0832E+08
454361.E-02  3.0769E+04  1.0769E+05  1.7692E+05  2.0000E+05  9.3077E+05  1.0775E+08
454491.E-02  7.6923E+03  1.1538E+05  1.3846E+05  1.2308E+05  7.1538E+05  1.0938E+08
454621.E-02  0.0000E+00  8.4615E+04  1.4615E+05  1.0769E+05  6.0769E+05  1.1142E+08
454751.E-02  1.5385E+04  1.3077E+05  7.6923E+04  8.4615E+04  5.0000E+05  1.1129E+08
454881.E-02  7.6923E+03  7.6923E+04  5.3846E+04  7.6923E+04  4.3846E+05  1.1286E+08
455011.E-02  1.5385E+04  1.0769E+05  1.0769E+05  6.1538E+04  3.3077E+05  1.1343E+08
455141.E-02  1.5385E+04  8.4615E+04  7.6923E+04  3.8462E+04  5.1538E+05  1.1280E+08
455271.E-02  1.5385E+04  5.3846E+04  4.6154E+04  9.2308E+04  2.7692E+05  1.1353E+08
455401.E-02  0.0000E+00  7.6923E+04  6.1538E+04  4.6154E+04  2.6923E+05  1.1429E+08
455531.E-02  2.3077E+04  5.3846E+04  4.6154E+04  2.3077E+04  2.9231E+05  1.1377E+08
455661.E-02  7.6923E+03  1.0000E+05  4.6154E+04  2.3077E+04  2.1538E+05  1.1534E+08
455791.E-02  7.6923E+03  6.1538E+04  3.8462E+04  0.0000E+00  2.1538E+05  1.1461E+08
455921.E-02  7.6923E+03  5.3846E+04  3.0769E+04  3.8462E+04  1.3846E+05  1.1447E+08
456051.E-02  1.5385E+04  5.3846E+04  3.8462E+04  2.3077E+04  2.0000E+05  1.1327E+08
456181.E-02  1.5385E+04  3.8462E+04  2.3077E+04  1.5385E+04  1.3077E+05  1.1310E+08
456311.E-02  2.3077E+04  5.3846E+04  3.8462E+04  3.8462E+04  1.6923E+05  1.1350E+08
456441.E-02  2.3077E+04  6.1538E+04  2.3077E+04  2.3077E+04  8.4615E+04  1.1395E+08
456571.E-02  2.3077E+04  5.3846E+04  3.0769E+04  3.0769E+04  8.4615E+04  1.1270E+08
456701.E-02  2.3077E+04  3.8462E+04  1.5385E+04  2.3077E+04  6.1538E+04  1.1299E+08
456831.E-02  0.0000E+00  4.6154E+04  7.6923E+03  7.6923E+03  1.3846E+05  1.0933E+08
456961.E-02  0.0000E+00  3.8462E+04  2.3077E+04  3.0769E+04  9.2308E+04  1.1175E+08
457091.E-02  7.6923E+03  4.6154E+04  1.5385E+04  1.5385E+04  6.1538E+04  1.1117E+08
457221.E-02  0.0000E+00  3.0769E+04  1.5385E+04  1.5385E+04  9.2308E+04  1.0791E+08
457351.E-02  7.6923E+03  1.5385E+04  7.6923E+03  3.0769E+04  9.2308E+04  1.0521E+08
457481.E-02  3.0769E+04  3.8462E+04  7.6923E+03  1.5385E+04  7.6923E+04  1.0342E+08
457611.E-02  0.0000E+00  1.5385E+04  1.5385E+04  7.6923E+03  5.3846E+04  1.0235E+08
457741.E-02  7.6923E+03  5.3846E+04  1.5385E+04  0.0000E+00  1.0000E+05  1.0040E+08
457871.E-02  7.6923E+03  2.3077E+04  2.3077E+04  1.5385E+04  5.3846E+04  9.7190E+07
458001.E-02  7.6923E+03  1.5385E+04  7.6923E+03  2.3077E+04  4.6154E+04  9.2666E+07
