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LASER-ABLATION OF POLYMERIC MATERIALS AT 157 NM

Abstract:

Results are presented on the ablation by 157 nm laser radiation of polytetrafluoroethylene (PTFE), polyimide, polyhydroxybutyrate (PHB), poly(methyl methacrylate) (PMMA), and poly(2-hydroxyethyl methacrylate) with 1% of ethylene glycol dimethacrylate as a crosslinking monomer. Direct photoetching of PHB and undoped PTFE is demonstrated for laser fluences ranging from 0.05 to 0.8 J/cm2. The dependence of the ablation process on the polymer structure is analyzed, and insight into the ablation m...

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Publication status:
Published

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Publisher copy:
10.1063/1.358756

Authors


COSTELA, A More by this author
GARCIAMORENO, I More by this author
FLORIDO, F More by this author
FIGUERA, J More by this author
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Journal:
JOURNAL OF APPLIED PHYSICS
Volume:
77
Issue:
6
Pages:
2343-2350
Publication date:
1995-03-15
DOI:
ISSN:
0021-8979
URN:
uuid:94862619-c7c2-42fb-95bc-2ec8f0e8d79a
Source identifiers:
2756
Local pid:
pubs:2756
Language:
English

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