- Abstract:
-
The effect of atomic hydrogen on the adsorbed layers formed on Si(100) from ethylene and acetylene exposure has been studied using thermal desorption spectroscopy. Considerable changes in surface reactivity patterns have been measured, with surface conversion reactions being favoured over the competition between thermal decomposition and molecular thermal desorption that is apparent for these species in the absence of atomic hydrogen. Abstraction by atomic hydrogen from adsorbed ethylene is f...
Expand abstract - Publication status:
- Published
- Publisher copy:
- 10.1016/0039-6028(94)90542-8
-
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- Publisher:
- Elsevier Science Publishers B.V.
- Journal:
- SURFACE SCIENCE
- Volume:
- 315
- Issue:
- 1-2
- Pages:
- 69-80
- Publication date:
- 1994-08-10
- DOI:
- ISSN:
-
0039-6028
- URN:
-
uuid:940ca0ce-67f0-4895-99ca-d6c18ec17768
- Source identifiers:
-
44588
- Local pid:
- pubs:44588
- Language:
- English
- Copyright date:
- 1994
Journal article
THE INTERACTION OF ATOMIC-HYDROGEN WITH ADSORBED ETHYLENE AND ACETYLENE ON SI(100)
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