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THE INTERACTION OF ATOMIC-HYDROGEN WITH ADSORBED ETHYLENE AND ACETYLENE ON SI(100)

Abstract:

The effect of atomic hydrogen on the adsorbed layers formed on Si(100) from ethylene and acetylene exposure has been studied using thermal desorption spectroscopy. Considerable changes in surface reactivity patterns have been measured, with surface conversion reactions being favoured over the competition between thermal decomposition and molecular thermal desorption that is apparent for these species in the absence of atomic hydrogen. Abstraction by atomic hydrogen from adsorbed ethylene is f...

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Publication status:
Published

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Publisher:
Elsevier Science Publishers B.V.
Journal:
SURFACE SCIENCE
Volume:
315
Issue:
1-2
Pages:
69-80
Publication date:
1994-08-10
DOI:
ISSN:
0039-6028
URN:
uuid:940ca0ce-67f0-4895-99ca-d6c18ec17768
Source identifiers:
44588
Local pid:
pubs:44588
Language:
English

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