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Micro-fracture testing of Ni-W microbeams produced by electrodeposition and FIB machining

Abstract:

Electrodeposited nickel-tungsten alloys are being considered as a candidate material for components for microelectromechanical systems (MEMS) fabricated by the LIGA (German acronym for lithography, electrodeposition, and forming) technology. In spite of having a useful range of properties including; hardness and strength, better tribological and chemical resistance and improved high temperature resistance as compared with the conventionally used electrodeposited Ni, these alloys possess certa...

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Authors


Armstrong, D More by this author
Wilkinson, A More by this author
Roberts, S More by this author
Journal:
Materials Research Society Symposium Proceedings
Volume:
983
Pages:
29-35
Publication date:
2007
ISSN:
0272-9172
URN:
uuid:90fbff1c-ca1d-4b9a-a315-04ac765ac2bb
Source identifiers:
430616
Local pid:
pubs:430616
Language:
English

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