Journal article icon

Journal article

CHARACTERIZATION OF PLASMA-DEPOSITED AMORPHOUS HYDROGENATED CARBON-FILMS BY NEUTRON REFLECTIVITY

Abstract:

Thin films (less than 2000 Å) of amorphous hydrogenated carbon have been characterized by neutron reflectivity measurements. Films were deposited onto silicon substrates from a methane r.f. plasma to produce both very hard and very soft materials. The critical angle and density give the film composition (CH0.55±0.05 hard film, CH0.78±0.08 soft film). Fitting the interference pattern to a model gives the film thickness and a measure of the extent of mixing at the silicon-carbon interface. A st...

Expand abstract
Publication status:
Published

Actions


Access Document


Authors


Expand authors...
Journal:
THIN SOLID FILMS
Volume:
172
Issue:
2
Pages:
269-282
Publication date:
1989-05-15
DOI:
ISSN:
0040-6090
Source identifiers:
121735
Language:
English
Pubs id:
pubs:121735
UUID:
uuid:8ec3bdce-4dbd-4ce4-bc76-831482222fd1
Local pid:
pubs:121735
Deposit date:
2012-12-19

Terms of use


Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP