Journal article
Quantitative measurements of singlet molecular oxygen in a low pressure ICP
- Abstract:
-
We present measurements of the densities and temperatures (rotational and translational) of the metastable a1Δg (v = 0) state of O2 in a cylindrically symmetric RF driven plasma operating in inductive mode at 100 mTorr total pressure and 300 W applied power. Line-of-sight absorption across the plasma region was determined by diode laser cavity ringdown spectroscopy on the (0, 0) vibrational band of the O2(b...
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- Publication status:
- Published
- Peer review status:
- Peer reviewed
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Authors
Bibliographic Details
- Publisher:
- IOP Publishing Publisher's website
- Journal:
- Plasma Sources Science and Technology Journal website
- Volume:
- 30
- Issue:
- 9
- Article number:
- 09LT02
- Publication date:
- 2021-09-27
- Acceptance date:
- 2021-08-23
- DOI:
- EISSN:
-
1361-6595
- ISSN:
-
0963-0252
Item Description
- Language:
- English
- Keywords:
- Pubs id:
-
1193536
- Local pid:
- pubs:1193536
- Deposit date:
- 2021-09-30
Terms of use
- Copyright holder:
- Rogers et al.
- Copyright date:
- 2021
- Rights statement:
- © 2021 The Author(s). Published by IOP Publishing Ltd. Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
- Licence:
- CC Attribution (CC BY)
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