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Electron diffraction based techniques in scanning electron microscopy of bulk materials

Abstract:

The three scanning electron microscope diffraction based techniques of electron channelling patterns (ECPs), electron channelling constrast imaging (ECCI), and electron backscatter diffraction (EBSD) are reviewed. The dynamical diffraction theory is used to describe the physics of electron channelling, and hence the constrast observed in ECPs (and EBSD) and ECCI images of dislocations. Models for calculating channelling contrast are described and their limitat...

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Publication status:
Published
Peer review status:
Peer reviewed
Version:
Accepted manuscript

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Publisher copy:
10.1016/S0968-4328(97)00032-2

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Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Role:
Author
Publisher:
Elsevier Publisher's website
Journal:
Micron Journal website
Volume:
28
Issue:
4
Pages:
279-308
Publication date:
1998-01-05
DOI:
EISSN:
1878-4291
ISSN:
0968-4328
URN:
uuid:7945f677-8df9-4f45-b8bb-e56d920edf8a
Source identifiers:
6886
Local pid:
pubs:6886

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