Journal article icon

Journal article

A CMOS Image Sensor Integrated with Plasmonic Colour Filters

Abstract:

Multi-pixel, 4. 5 × 9 μm, plasmonic colour filters, consisting of periodic subwavelength holes in an aluminium film, were directly integrated on the top surface of a complementary metal oxide semiconductor (CMOS) image sensor (CIS) using electron beam lithography and dry etch. The 100 × 100-pixel plasmonic CIS showed full colour sensitivities across the visible range determined by a photocurrent measurement. The filters were fabricated in a simple process utilising a single lithography step. ...

Expand abstract
Publication status:
Published

Actions


Access Document


Publisher copy:
10.1007/s11468-012-9360-6

Authors


Chitnis, D More by this author
Drysdale, TD More by this author
Expand authors...
Journal:
PLASMONICS
Volume:
7
Issue:
4
Pages:
695-699
Publication date:
2012-12-05
DOI:
EISSN:
1557-1963
ISSN:
1557-1955
URN:
uuid:88ffa7d7-37f5-460b-bae4-8d5088816f61
Source identifiers:
364414
Local pid:
pubs:364414

Terms of use


Metrics



If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP