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Journal article

Nanometer-scale mechanical imaging of aluminum damascene interconnect structures in a low-dielectric-constant polymer

Publication status:
Published

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Publisher copy:
10.1063/1.1447330

Authors


Kolosov, OV More by this author
Briggs, GAD More by this author
Shekhawat, GS More by this author
Journal:
JOURNAL OF APPLIED PHYSICS
Volume:
91
Issue:
7
Pages:
4549-4555
Publication date:
2002-04-01
DOI:
ISSN:
0021-8979
URN:
uuid:82e5d341-2637-4a4e-af50-4c4c3646614e
Source identifiers:
174533
Local pid:
pubs:174533

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