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Chemical mechanical polishing of thin film diamond

Abstract:

The demonstration that Nanocrystalline Diamond (NCD) can retain the superior Young's modulus (1100 GPa) of single crystal diamond twinned with its ability to be grown at low temperatures (<450 C) has driven a revival into the growth and applications of NCD thin films. However, owing to the competitive growth of crystals the resulting film has a roughness that evolves with film thickness, preventing NCD films from reaching their full potential in devices where a smooth film is required. To ...

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Authors


Thomas, ELH More by this author
Nelson, GW More by this author
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry, Physical and Theoretical Chem
Williams, OA More by this author
Journal:
Carbon
Volume:
68
Pages:
473-479
Publication date:
2014-03-05
DOI:
ISSN:
0008-6223
URN:
uuid:8191f2ad-002f-4a87-8a2f-ffe82788d891
Source identifiers:
447289
Local pid:
pubs:447289
Language:
English

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