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Fabrication of ultrathin single-crystal diamond membranes

Abstract:

A method for preparing ultrathin single-crystal diamond membranes suitable for post-processing and liftout, is reported. The proposed method used single-crystal diamond substrates and two-energy ion implant process for the fabrication of thin diamond membranes. Two ion-implant process was used in this method to prepare two different damage layers within diamond sample. This method can be used for preparing integrated quantum-photonic structure based on color center in diamond. This method can...

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Publisher copy:
10.1002/adma.200801460

Authors


Fairchild, BA More by this author
Olivero, P More by this author
Rubanov, S More by this author
Greentree, AD More by this author
Waldermann, F More by this author
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Journal:
Advanced Materials
Volume:
20
Issue:
24
Pages:
4793-4798
Publication date:
2008-12-17
DOI:
ISSN:
0935-9648
URN:
uuid:806e3929-ca90-46eb-8596-e2ca8c061c5e
Source identifiers:
134335
Local pid:
pubs:134335
Language:
English

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