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Characterization of an inductively coupled N-2 plasma using sensitive diode laser spectroscopy

Abstract:

In this paper, we present an optical study of the A 3∑u+ state of N2 produced in an inductively coupled plasma. The operation of the discharge was characterized using ion flux measurements and broadband optical emission, and a clear change from capacitively to inductively coupled behaviour was observed with increasing applied power. The typical ion flux at 100 W and 10 mTorr was found to be 1.8×1018 m2 s-1, from which a N 2+ ion density of ∼1.5×109 cm -3 was inferred. Diode laser cavity enhan...

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Publication status:
Published

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Publisher copy:
10.1088/0022-3727/27/15/004

Authors


More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author
Journal:
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume:
37
Issue:
15
Pages:
2064-2072
Publication date:
2004-08-07
DOI:
EISSN:
1361-6463
ISSN:
0022-3727
Source identifiers:
39112
Language:
English
Pubs id:
pubs:39112
UUID:
uuid:77413ca9-c2fa-41c3-8955-846730df109a
Local pid:
pubs:39112
Deposit date:
2012-12-19

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